复合式高速高精度AFM测量系统OA

To achieve high-speed and high-precision measurements using atomic force microscopy(AFM),a novel compound AFM system structure is proposed.The structure adopts modular design,with the top module utilizing a three-axis piezoelectric nanoplatform with a large-stroke,low-speed Z-scanner,and the bottom module employing a laser-followed optical structure with a small-stroke,high-speed Z-scanner(2 μm stroke).The bottom module is serially conne-cted and fixed to the low-speed Z-direction scanner of the three-axis nanoplatform,enabling optical path follow-up during the scanning process.This serial configuration of two scanners with differing bandwidths and strokes accommodates the requirements for large-scale height measurements and high-speed scanning,achieving a scanning speed that is 4 times greater than that of traditional single scanners.Additionally,an online and dynamic self-tuning control strategy for scanner sensitivity parameters is proposed to address the issue of nonlinearity in the high-speed Z-direction scanner,which affects measurement accuracy.This strategy effectively mitigates sensitivity variations caused by the nonlinearity of the piezo-electric ceramics,thereby enabling high-precision measurements.