基于A-Zernike矩的精密运动平台定位误差校准方法OA

To address the issues of insufficient accuracy,operational complexity,and the high cost of popularizing precision calibration methods for micrometer-level precision motion stages in lithography and similar precision equipment,a cost-effective visual calibration method was proposed based on adaptive gra-dient Zernike moments(A-Zernike moments).First,initial edge points were screened based on the morpho-logical features of the target.Adaptive extraction of sub-pixel edges was then achieved through a linear gra-dient model,gradient sampling,and Gaussian fitting,thereby accurately obtaining the target center posi-tion.Subsequently,by analyzing the variation patterns of errors,an association model was established be-tween system parameters and changes in target position to realize multi-parameter integrated calibration.Finally,based on the calibration results,a conversion relationship was constructed between image coordi-nates and stage displacement to accomplish the calculation and compensation of positioning errors.Experi-mental results show that the edge detection accuracy of the A-Zernike moment method is improved by 47.41%compared with traditional methods,and the maximum positioning error of the stage is reduced from 15.601 μm to 0.783 μm after calibration.The proposed method significantly enhances the calibration efficiency and reliability of micrometer-level motion stages.