氮化铝HTCC基板微波性能和可靠性研究OA

The typical structure of aluminum nitride(AlN)high-temperature co-fired ceramic(HTCC)microwave substrate is in-troduced in this paper,and dielectric properties and microwave transmission performance of the substrate are investigated,followed by environmental tests and reliability studies.The results indicate that AlN HTCC substrate exhibits low dielectric constant and die-lectric loss at microwave frequencies,meeting the design requirements for microwave substrate.After undergoing high-temperature storage,thermal cycling,thermal shock and damp heat tests,the relevant technical performance of the substrate shows no signs of deterioration or degradation.However,slight corrosion is observed on the metal film layer and parts of the substrate material follow-ing the damp heat test.After the salt spray test,the protection rating of the gold-plated metal film layer is between grade 8 and grade 9,indicating some corrosion;therefore,exposures to humid and salt fog environments are not recommended.The research findings in this paper provide a basis for the design and development of radar high-power microwave modules or components and have already been implemented in engineering applications.