伺服频率对超精密机床性能影响OA

To investigate the influence of servo frequency in the control system of a multi-axis coordinated ultra-precision machine tool on its dynamic performance,this study established a servo frequency matching and performance evaluation method combining simulation and experimentation.A simulation model of the ultra-precision machine tool servo control system was developed,and the effect of servo frequency on the output accuracy of the linear motor-driven guideway was examined using a single-variable approach.The simulation results indicate that a higher servo frequency helps suppress the influence of external disturbanc-es on motor thrust output.In this study,tracking error and repeat positioning accuracy were used as perfor-mance indices to validate the machine tool system.A position-control experimental platform was built,and the experimental results show that increasing the servo frequency reduces tracking error,improves re-sponse speed,and enhances positioning accuracy.However,due to hardware limitations,when the servo frequency exceeds 8 kHz,the proportion of dead time becomes too large,thereby reducing the closed-loop stability margin;therefore,the servo frequency should not exceed 8 kHz.To address the difficulty of di-rectly correlating servo frequency with machine tool performance,linear correlation analysis was employed to establish a direct relationship between the positional experimental results and the simulation results,thereby identifying 8 kHz as the optimal servo frequency.In the single-crystal nickel turning experiments,the workpiece machined under the optimal servo frequency exhibited improvements of 23％in Sa and 13％in P-V compared with those machined under non-optimal servo frequencies.The results demonstrate that the optimal servo frequency can effectively improve surface quality and enhance the machining performance of ultra-precision machine tools,providing a theoretical basis for the hardware design and performance opti-mization of ultra-precision machine tool control systems.