压电快速反射镜μ综合优化的高增益回路整形控制方法OA

To enhance the tracking performance and disturbance rejection capability of a piezoelectric Fast Steering Mirror(FSM),this paper proposed a u-synthesis-optimized high-gain loop shaping(Oμ-HGLS)method.First,based on hysteresis inverse compensation,the dynamic characteristics of the piezoelectric FSM were identified,and the modeling errors were treated as model uncertainties.Then,the μ-synthesis method was employed to perform robust performance optimization of the Q filter,increasing the loop gain while accounting for model uncertainties,thereby improving tracking accuracy and disturbance rejection without compromising system robustness.Finally,comparative experiments were conducted on the piezo-electric FSM to validate the effectiveness of the proposed Oμ-HGLS method.Experimental results demon-strate that when tracking a 100 Hz sinusoidal trajectory,the root mean square error of the Oμ-HGLS meth-od is reduced by approximately 53.4％compared to the conventional HGLS method,and by approximate-ly 18.7％compared to the H∞-optimized high-gain loop shaping(Oh-HGLS)method.Under a single-fre-quency disturbance,the root mean square error of the Oμ-HGLS method is reduced by approximately 54.8％relative to the HGLS method and by approximately 17.6％relative to the Oh-HGLS method.The above results demonstrate that the proposed method has significant advantages in improving the control performance of piezoelectric fast steering mirrors,providing an effective control strategy for high-precision motion control.