反射型超表面彩色滤光结构OA

Traditional reflective filters had narrow color gamut,low energy utilization and low fabrication efficiency.These problems limited their applications.This work studied micro-nano structures for reflec-tive filtering.A one-dimensional dielectric grating-metal-dielectric metasurface was designed.The materi-als were photoresist,Ag,and TiO2.The finite-difference time-domain method was used.It analyzed key structural parameters.These parameters included grating groove depth,dielectric layer thickness,duty cy-cle and grating period.The structure was optimized based on these analyses.The results show that the structure enables continuous color tuning.The tuning covers the whole visible band.The grating period ranges from 280 nm to 480 nm.The full width at half maximum is below 100 nm.This holds for all reflec-tion spectra.The electric field is confined in the TiO2layer under guided-mode resonance.This confine-ment leads to high energy utilization.The measured central wavelengths of the RGB peaks are obtained.They are 613 nm,562 nm,and 491 nm.The corresponding peak reflectivities are measured.They are 55％,57％,and 54％.These values agree well with simulations.A time-division multiplexed multi-inter-ference optical field is used.This field generates multiple interference patterns.It fabricates a 3×3 pixel structure in one step.This method greatly improves fabrication efficiency.It avoids multiple exposures and reduces fabrication time significantly.The proposed structure shows excellent spectral selectivity and high color purity.The colors are vivid and stable.The structure is compatible with micro-nano fabrica-tion.It can be integrated with existing processes.It can support display imaging applications,infrared de-tection and biosensing.These fields benefit from its high performance.The structure offers a promising so-lution.It addresses key challenges in traditional reflective filtering.