伯努利吸盘喷嘴结构设计及仿真分析OA
Design and Simulation of Nozzle Structure for Bernoulli Gripper
目前半导体行业中对硅片的搬运提出了低破片率和节能的要求.伯努利吸盘因其结构简单、无污染等特点被广泛应用于搬运行业中.由于伯努利吸盘在吸附硅片时会对硅片产生较大正压值,从而形成较大的剪切应力使硅片破损,同时吸盘的耗气量也造成较大能源浪费.因此为了解决这些问题,对吸盘喷嘴进行结构设计.喷嘴作为伯努利吸盘的核心结构,其不同形状结构、不同设计参数对吸盘整体的压力分布以及耗气量有着决定性的作用.为了使吸盘在满足低破片率的情况下实现耗气量小的设计目标,利用 CFD对矩形、三角形、圆弧形三种形状的喷嘴以及 0.3、0.4、0.5 mm 三种不同喷嘴高度进行数值模拟仿真,确定合适的评价指标,获取吸盘半径与底部静压的曲线,得到0.4 mm 高度圆弧形喷嘴的吸盘结构性能最优.
The semiconductor industry currently demands low breakage rates and energy efficiency for wafer handling.Bernoulli grippers are widely used due to their simple structure and contamination-free nature.However,high positive pressure during adsorption creates shear stress that damages wafers,while high air consumption leads to energy waste.The nozzle is the core component of the gripper.Its geometry and design parameters determine the pressure distribution and air consumption.We optimize the nozzle structure to achieve low breakage rates and reduced energy consumption.Numerical simulations are carried out using CFD for three nozzle shapes:rectangular,triangular,and arc.We also evaluate three nozzle heights:0.3,0.4 and 0.5 mm.Appropriate evaluation metrics are established to obtain curves of gripper radius versus bottom static pressure.Results indicate that the arc-shaped nozzle with a height of 0.4 mm offers the optimal performance.
王志帅;王海涛;凌青;黄震;庞卓锐
大连海事大学 船舶与海洋工程学院,辽宁 大连 116026大连海事大学 船舶与海洋工程学院,辽宁 大连 116026SMC 自动化有限公司,北京 100176SMC 自动化有限公司,北京 100176SMC 自动化有限公司,北京 100176
机械制造
伯努利吸盘喷嘴CFD性能设计
Bernoulli grippernozzleCFDdesign for performance
《液压与气动》 2026 (9)
47-54,8
国家自然科学基金面上项目(52075065)
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