芯片行业"三废"排放及旋流过程强化新技术应用展望OA

Significance Waste streams from chip manufacturing feature complex compositions,broad particle size distributions,diverse phase states,and considerable potential for resource recovery.Major treatment bottlenecks include the separation of micro-and nanoscale particles and emulsified droplets,the removal of high concentrations of refractory organic compounds,and the recovery of valuable components from fluoride-containing wastewater,sludge,and waste solvents.Conventional treatment can achieve pollutant removal,but advanced membrane,oxidation,and thermal processes often increase material,chemical,and energy consumption and may generate secondary waste streams.Improving multiphase separa-tion and transport efficiency while reducing resource consumption is therefore essential.Cyclone-based intensification generates strong centrifu-gal fields that promote phase separation,interfacial renewal,and heat and mass transfer,providing a promising approach for enhancing existing treatment and resource recovery processes. Progress Treatment and resource recovery technologies for major waste streams were reviewed according to manufacturing processes and pollut-ant characteristics.Wastewater mainly includes fluoride-containing wastewater,turbid wastewater represented by chemical mechanical polishing(CMP)wastewater,and high-concentration organic wastewater.High-concentration fluoride-containing wastewater generated during etching and cleaning generally contains 400 ‒ 1 200 mg/L fluoride.Calcium salt precipitation together with coagulation and solid-liquid separation is com-monly applied for fluoride removal.Adsorption,ion exchange,nanofiltration,and reverse osmosis can provide additional treatment routes when stricter discharge or reuse requirements apply.Crystallization offers a resource recovery route by converting dissolved fluoride into recoverable calcium fluoride(CaF2)particles,thereby reducing the generation of fluoride-containing sludge.CMP wastewater contains nanoscale abrasives,colloidal silica,metal oxides,and organic additives.The geometric mean size of silica particles is approximately 100 nm,which contributes to col-loidal stability and poor natural settling.Coagulation‒flocculation followed by sedimentation or flotation can destabilize and separate these par-ticles,whereas filtration and membrane separation can be used for advanced treatment and water reuse.High-concentration organic wastewater is mainly generated during photoresist development,stripping,and cleaning and may contain tetramethylammonium hydroxide(TMAH),N-methyl-2-pyrrolidone(NMP),dimethyl sulfoxide,isopropyl alcohol,and photoresist residues.Ion exchange,membrane separation,evaporation,or distil-lation can be used for relatively concentrated wastewater streams with simple compositions.For mixed wastewater with poor biodegradability,ad-vanced oxidation coupled with biological treatment can improve biodegradability and enhance the removal of refractory organics. Waste gas primarily contains acidic and alkaline gases,volatile organic compounds(VOCs),fluorinated greenhouse gases,toxic process gases,and particulate matter.Wet scrubbing removes hydrogen fluoride,hydrogen chloride,acid mist,and ammonia through gas‒liquid contact and neutralization.VOC-containing exhaust from photolithography,cleaning,and coating is generally characterized by large flow rates,low con-centrations,complex compositions,and fluctuating loads.Zeolite rotor concentration coupled with regenerative thermal oxidation is a typical treatment route for these streams.Fluorinated greenhouse gases such as CF4,C2F6,C3F8,SF6,and NF3 are chemically stable and difficult to re-move using conventional wet scrubbing.Point-of-use treatment based on high-temperature decomposition,combustion,plasma decomposition,or catalytic decomposition can convert them into products suitable for subsequent wet scrubbing.Toxic gases such as SiH4,PH3,and AsH3 require separate collection and specialized treatment.Solid waste mainly includes wastewater treatment sludge,waste organic solvents,and process resi-dues.Fluoride-containing sludge,heavy metal sludge,and CMP sludge contain CaF2,metals,or inorganic particles with potential recovery value.Their management is shifting toward dewatering,volume reduction,valuable component recovery,and resource utilization.Waste organic sol-vents can be purified by distillation,adsorption,or membrane separation and subsequently reused.The feasibility of resource recovery depends on waste composition,treatment scale,recovery efficiency,product quality,and energy and chemical consumption.Accordingly,treatment tech-nologies should be evaluated in terms of pollutant removal,resource recovery,secondary waste generation,and economic performance. Cyclone intensification was further assessed from the perspectives of separation,mass transfer,and heat transfer.In wastewater treatment,cyclone-based processes can enhance the separation of fine particles in CMP wastewater,solid‒liquid separation of CaF2 particles,demulsifica-tion of emulsified wastewater,and liquid ‒ solid contact during adsorption.Meanwhile,in waste gas treatment,microcyclone separation and cyclone-enhanced gas‒liquid contact can improve the capture of fine particles and interfacial mass transfer.For solid waste,high-speed particle self-rotation can intensify heat and mass transfer and accelerate sludge drying.These applications demonstrate the potential of cyclone intensifica-tion as an intensification unit for existing waste treatment processes. Conclusions and Prospects Waste management in the chip industry is shifting from end-of-pipe treatment toward differentiated treatment,advanced wa-ter reuse,and resource recovery.Cyclone-based process intensification demonstrates promising potential for enhancing existing treatment processes rather than replacing entire treatment systems.Future research should focus on corrosion-resistant materials,separation of ultrafine particles,contamination control under intensive cleanliness requirements,process integration,and long-term operational stability.Pilot-scale validation under actual chip manufacturing con-ditions is also needed to evaluate treatment performance,energy consumption,economic feasibility,and engineering applicability,thereby supporting the practical implementation of cyclone-based process intensification in waste treatment and resource recovery.