压电振动传感器原位自校准方法研究OA

To address problems in environments like wind tunnels,which require long-term online monitoring,periodic disassembly for calibration is difficult to achieve,and traditional vibration sensors with built-in calibration coils are limited to low-frequency self-calibration below 10 Hz,a novel in-situ self-calibration method based on piezoelectric vibration sensors is proposed.This method uses a drive-sensor series integrated structure to enhance sensitivity,applying the driving force generated by a piezoelectric stack actuator under known excitation to the piezoelectric sensor for detection,thereby achieving in-situ self-calibration.The theoretical model's validity is first validated through finite element simulation.Experimental measurements are then conducted for low-frequency and mid-frequency self-calibration.Experimental results demonstrate that,across varying excitation voltages,the deviation between the experimental value and the theoretical value of the sensor charge sensitivity does not exceed 3.58%.Within the 5～300 Hz frequency range,deviations consistently remained below 5%.While accurately achieving mid-frequency self-calibration,sensitivity is significantly enhanced to over 50 pC/(m·s-2),thereby broadening the application scope of in-situ self-calibration.