一种基于IPD工艺的 2~8 GHz超宽带芯片功分器OA
An ultra-broadband chip power divider operating from 2 GHz to 8 GHz based on IPD technology
为满足射频微波领域功分器在小型化、超宽带与低损耗方面的综合需求,基于砷化镓衬底高精度集成无源器件(Integrated Passive Device,IPD)工艺,设计并研制出一款全集总参数结构的超宽带芯片功分器.采用薄膜电阻、螺旋电感及金属-绝缘体-金属(MIM)电容构建多级等效传输线网络,并基于史密斯圆图辅助的低Q多级阻抗变换匹配技术进行设计;利用ADS软件对各无源器件进行精细化电磁仿真与参数提取,通过电路-电磁场联合仿真与迭代优化设计,并采用IPD工艺完成芯片流片.测试结果表明:该功分器工作频率覆盖 2~8 GHz,扣除固有分配损耗后,带内插入损耗小于0.8 dB,各端口回波损耗大于12 dB,输出隔离度优于16.5 dB;实测结果与仿真预测高度吻合.该功分器芯片尺寸仅为 1.6 mm×1.2 mm×0.1 mm,实现显著小型化,便于系统集成,在4G/5G移动通信、雷达及卫星通信等射频系统中具有广阔的应用前景.
To address the combined requirements of miniaturization,ultra-wideband performance,and low insertion loss for power dividers in the radio frequency and microwave domain,an ultra-wideband chip power divider with a fully lumped-element structure was designed and implemented based on a high-precision integrated passive device(IPD)process on a gallium arsenide(GaAs)substrate.In terms of methodology,thin-film resistors,spiral inductors,and metal-insulator-metal(MIM)capacitors were employed to construct a multi-section equivalent transmission line network,combined with a low-Q multi-section impedance transformation matching technique guided by the Smith chart.Detailed electromagnetic simulations and parameter extraction for each passive component were carried out using ADS software,and the design was completed through co-simulation of circuit and electromagnetic fields along with iterative optimization.The chip was subsequently fabricated using the IPD process.Measured results demonstrate that the power divider operates over a frequency range from 2 GHz to 8 GHz.Excluding the inherent splitting loss,the in-band insertion loss is less than 0.8 dB,the return loss at each port exceeds 12 dB,and the output isolation is better than 16.5 dB.The measured data show good agreement with simulation predictions.The chip occupies an area of only 1.6 mm×1.2 mm×0.1 mm,achieving significant miniaturization and easy system integration.It offers broad application prospects in RF systems such as 4G/5G mobile communications,radar,and satellite communications.
陆宇
中国电子科技集团公司第十研究所,四川 成都 610036
信息技术与安全科学
砷化镓集成无源器件功分器超宽带小型化
GaAsintegrated passive devicepower dividerultra-broadbandminiaturization
《电子元件与材料》 2026 (8)
937-942,6
四川省科技厅支撑项目(2024ZHCG0181)
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