基于频差法的多重传感耦合微机械谐振器OA

To meet the demand for sensing of many inertial physical quantities,a coupled micromachined resonators multi-sensing scheme based on differential-frequency detection was developed for simultaneous high-precision measurement of mass and acceleration.The system dynamic model with electrostatic excitation were modeled based on coupled beam theory.Key structural parameters and driving conditions were optimized through theoretical analysis and finite element simulations.Mass and acceleration perturbations were separately detected using the differential-frequency method.The influence of coupling strength on the two types of differential-frequency responses was systematically analyzed.Results indicate that differential-frequency responses exhibit good linearity with respect to both mass and acceleration perturbations.Coupling strength has a significant regulatory effect on detection sensitivity.The scheme is proved to be feasible and effective for synchronous sensing of multiple physical quantities.