Speckle-based curvature optical metrologyOA
Speckle-based curvature optical metrology
Hongchang Wang;Riley Shurvinton;Paresh Pradhan;Kawal Sawhney
Diamond Light Source Ltd,Harwell Science and Innovation Campus,Didcot OX11 0DE,UKDiamond Light Source Ltd,Harwell Science and Innovation Campus,Didcot OX11 0DE,UKDiamond Light Source Ltd,Harwell Science and Innovation Campus,Didcot OX11 0DE,UKDiamond Light Source Ltd,Harwell Science and Innovation Campus,Didcot OX11 0DE,UK
《光：科学与应用（英文版）》 2026 (7)
2237-2250,14
This work was carried out with the support of Diamond Light Source Ltd,UK.The authors would like to acknowledge Wai Jue Tan,Arindam Majhi,and Wadwan Singhapong for their contributions to multilayer deposition and the collection of MOS and SCOM stress data.They are also very grateful to Adam Howell for software support,Ali Mohammadi Anari for generating the IBF drawing,and Andrew Malandain for technical assistance.The authors particularly thank Lingfei Hu,Ioana Nistea,Murilo Bazan Da Silva,and Simon Alcock for their inspiring discussions.
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