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初始损伤对熔石英磨削影响机制的分子动力学研究OA

Molecular Dynamics Study on Influence Mechanism of Initial Damage on Fused Silica Grinding

中文摘要英文摘要

目的 熔石英广泛应用于光学系统以及高端装备领域,对加工中的损伤控制要求较高.在多次加工中,前次加工引入的损伤会改变后续磨削材料的初始状态,明确其如何影响后续磨削过程,对制定高效率、低损伤的加工方案具有重要意义.研究旨在揭示初始损伤对熔石英后续磨削的影响,并分析超声振动辅助磨削的损伤调控作用.方法 建立熔石英单磨粒磨削分子动力学模型,根据不同切深下响应变化建立损伤程度依次加剧的 3 种材料模型,分析其在常规磨削中的差异与超声振动辅助磨削对加工损伤的抑制作用.结果 材料损伤程度随切深增大而加剧.归一化切深λ=0.20 建立的损伤材料在后续磨削中仍会产生较为明显的新增致密化层;由λ=0.60 建立的损伤材料在后续磨削中表面轮廓和内部结构变化较小;由λ=1.00 建立的损伤材料去除更明显,但亚表面结构不均匀性进一步增强.超声振动辅助磨削显著降低磨削过程中的平均法向力,抑制了剪切变形向亚表面扩展,并减弱了网络连接角收缩和亚表面致密化.结论 材料损伤程度随切深增大而增强,初始损伤程度会改变材料在后续磨削中的损伤演化,磨削结果不随损伤程度单调变化.超声振动辅助磨削可降低平均法向力及亚表面致密化程度.

Fused silica is widely used in optical systems and high-end equipment because of its excellent optical properties,low thermal expansion coefficient,and good thermal and chemical stability.However,fused silica is a typical hard and brittle material,and the surface or subsurface damage introduced during its grinding can strongly affect its service performance.In repeated grinding processes,the material subjected to a subsequent grinding pass is no longer in an undamaged initial state.The damage generated by the previous machining process changes the surface morphology,subsurface densification state,and local network structure of the material,which may further affect the contact behavior between the abrasive grain and fused silica in the subsequent grinding process.Therefore,clarifying how the initial damage state affects subsequent grinding is important for developing high-efficiency and low-damage machining strategies.In this work,a molecular dynamics model of single abrasive grain grinding of fused silica is established to investigate the influence mechanism of initial damage on subsequent grinding.First,the grinding process of undamaged fused silica under different grinding depths is simulated,and the changes in the grinding force,surface morphology,subsurface densification,and short-range structural parameters are analyzed.The ratio of grinding depth to abrasive grain radius is defined as the normalized grinding depth(λ).Based on the grinding results under different grinding depths,three pre-damaged material states with gradually increasing damage degrees are constructed.These pre-damaged models are then used as the initial material states for subsequent grinding under the same grinding condition,so that the influence of the initial damage state on the material removal,grinding force,surface profile,and subsurface structural evolution could be compared.Furthermore,ultrasonic vibration-assisted grinding is introduced into the subsequent grinding process of pre-damaged fused silica to analyze its influence on the suppression of machining-induced damage.In the ultrasonic vibration-assisted grinding simulation,a periodic vibration is applied along the normal direction of the abrasive grain,so that the contact mode between the abrasive grain and the material is changed from continuous contact to periodic intermittent contact.The simulation results show that increasing the grinding depth enhances the normal indentation and tangential sliding interaction between the abrasive grain and fused silica,and the material damage degree increases with the grinding depth.For the pre-damaged material generated at λ=0.20,the initial damage degree is relatively low,and a relatively obvious additional subsurface densification appears during subsequent grinding.For the pre-damaged material generated at λ=0.60,the changes in surface profile and internal structure during subsequent grinding are relatively small,indicating that the pre-existing densified region can accommodate part of the subsequent mechanical loading and reduce additional structural rearrangement under the same subsequent grinding condition.For the pre-damaged material generated at λ=1.00,material removal becomes more pronounced,whereas subsurface structural heterogeneity is further enhanced,indicating that excessive initial damage may promote material removal while increasing non-uniform subsurface structural modification.Compared with conventional grinding,ultrasonic vibration-assisted grinding significantly reduces the average normal force during subsequent grinding.The average normal force of the three damage states decreases by 37.4%,39.8%,and 41.0%,respectively.The reduction in the normal force indicates that ultrasonic vibration weakens the continuous normal indentation of the abrasive grain into the material.Stress and strain analyses further show that abrasive grain-workpiece recontact produces localized transient stress concentrations,whereas the subsequent separation and unloading shorten the duration of high-stress loading.At the same time,ultrasonic vibration-assisted grinding mitigates the decrease of the Si—O—Si bond angle associated with network densification and reduces the densification degree of the subsurface layer after machining.These results show that the initial damage state changes the grinding force,surface morphology,and subsurface damage evolution during subsequent grinding,and the subsequent grinding result does not vary monotonically with the increase in the initial damage degree.Under the investigated conditions,the pre-damaged material generated at λ=0.60 exhibits a better balance between material removal and damage control among the three damage states considered.Ultrasonic vibration-assisted grinding reduces the dependence of the normal force on the initial damage state,while periodic separation and unloading suppress the persistent accumulation of shear deformation and subsurface densification.

林洁琼;李国庆;谷岩;赵佳鑫;付斌

长春工业大学 机电工程学院,长春 130012||吉林省微纳与超精密制造重点实验室,长春 130012长春工业大学 机电工程学院,长春 130012||吉林省微纳与超精密制造重点实验室,长春 130012长春工业大学 机电工程学院,长春 130012||吉林省微纳与超精密制造重点实验室,长春 130012长春工业大学 机电工程学院,长春 130012||吉林省微纳与超精密制造重点实验室,长春 130012长春工业大学 机电工程学院,长春 130012||吉林省微纳与超精密制造重点实验室,长春 130012

机械制造

分子动力学模拟熔石英超声振动辅助磨削单磨粒磨削

molecular dynamics simulationfused silicaultrasonic vibration-assisted grindingsingle abrasive graingrinding

《表面技术》 2026 (16)

113-130,18

国家自然科学基金联合基金(U24A20126)Joint Funds of the National Natural Science Foundation of China(U24A20126)

10.16490/j.cnki.issn.1001-3660.2026.16.009

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