辐照环境下MEMS压力传感器封装的多尺度模拟研究OA

To address the mechanical property degradation of 316L stainless steel-used as the core material of the corrugated diaphragm in oil-filled isolated Micro-Electro-Mechanical Systems(MEMS)pressure sensors-under strong irradiation conditions,the research team adopted a cross-scale simulation method combining Molecular Dynamics(MD)and Finite Element Analysis(FEA).The regulatory effects of Primary Knock-on Atom(PKA)energy,irradiation temperature,and pre-strain on the evolution of Frenkel defects in 316L steel were systematically investigated,and a quantitative correlation model between defect concentration and the elastic modulus,sensitivity,and failure risk of the diaphragm was established.The results show that the evolution of Frenkel defects proceeds through three stages:rapid proliferation,recombination attenuation,and stable equilibrium.PKA energy is positively linearly correlated with the number of stable defects.High temperatures and compressive pre-strain can inhibit defect retention,while tensile pre-strain promotes defect proliferation.The elastic modulus of the diaphragm decreases linearly with increasing defect concentration,whereas the sensitivity increases.Consequently,the failure risk rises significantly.These research results achieve cross-scale coupled quantification of micro-defects and macro-performance,providing a reference for the design of sensor diaphragms for nuclear environments.