电容式三维纳米测量测头OA

Three-dimensional(3D)nanoprobe systems are critical components of micro/nano coordinate measuring machines;however,the measurement capability of existing probes remains insufficient for de-manding practical applications.To address this limitation,a 3D nanoprobe based on capacitive displace-ment sensing is developed and experimentally evaluated.The probe comprises capacitive displacement sensors,electrode plates,a compliant mechanism,and a stylus.Three high-precision capacitive displace-ment sensors are arranged in an equilateral-triangular configuration.A geometric model converts the sen-sor outputs into the displacement of the probing sphere and determines the probe orientation.Experimental results demonstrated a 3D resolution better than 3 nm.The measurement range reached 260 μm in the hor-izontal direction and 70 μm in the vertical direction.Contact repeatability was better than 9.4 nm horizon-tally and 8.7 nm vertically.These results confirm the suitability of the proposed probe for micro/nanoscale dimensional measurement and support its application in precision manufacturing and inspection.