基于气隙磁场耦合的平面二维位移传感器研究OA

Targeting at the problem that the output induced signal of the planar two-dimensional time-gating displacement sensor with single layer coupling is small,a design scheme of the planar two-dimensional time-gating displacement sensor with double layer coupling is proposed.The generation mechanism of sensor induced signal is derived.Through electromagnetic field simulation analysis,under the same conditions,the amplitude of double-layer coupling in x direction and y direction is increased by about 40%and 37.5%respectively,and the signal-to-noise ratio is enhanced.The optimum air gap spacing is determined to be 0.3 mm,the sensor prototype of 200 mm×200 mm is manufactured by printed circuit board(PCB)technology,and the accuracy is tested.The experimental results show that the error in x direction and y direction is 53.020 μm and 41.920 μm respectively in the measuring range of 200 mm×200 mm.The quadratic error of double-layer coupled structure is reduced from 1.212 μm to 0.798 μm,compared with that of single-layer coupled structure.The four times error is reduced from 7.291 μm to 6.557 μm,which improves the measurement accuracy and verifies the validity of the structure.