硅基前驱体标准化发展现状与思考OACHSSCD

Silicon-based precursors fall under the category of precursors in electronic chemicals and serve as source materials for chemical vapor deposition and atomic layer deposition.They are widely used in the deposition processes of the semiconductor industry,including integrated circuits and next-generation displays.As integrated circuit processes continue to evolve,the requirements for silicon-based precursors are becoming increasingly stringent.Currently,there is a mismatch between the status of standards and the realities of the industry,rendering the standards unsuitable for their intended purposes and hindering their ability to fully fulfill their role in supporting and guiding the sector.This paper takes the current development status and needs of the precursors industry as its starting point,analyzes the current state of standards,and proposes ideas and recommendations for the systematic development of precursor standards.