小像元碲镉汞长波红外焦平面探测器OA
Small pixel cadmium telluride mercury long wave infrared focal plane detector
采用砷离子注入p-on-n平面结技术制备了长波碲镉汞1024×768(10 μm)焦平面探测器组件,77 K工作温度下器件后截止波长为9.61 μm.在半阱条件下对探测器组件的基本性能进行了测试,结果表明器件黑体响应率非均匀性为4.15%,平均值NETD为28.5 mK,有效像元率为99.81%.在长波碲镉汞1024×768(10 μm)焦平面探测器芯片组表面设计和制备了专用的金属微结构,并对像元间串扰进行了表征分析,结果显示器件串音为12.3%,MTF为0.35.最后对探测器组件进行了室外场景和室内人物成像演示,均显现出较好的成像效果.
A long wave cadmium telluride mercury 1024×768(10 μm)focal plane detector assembly was prepared by ar-senic ion implantation p-on-n planar junction technology.The cutoff wavelength of the device is 9.61 μm at 77 K.The basic performance of the detector assembly was characterized under half well filling level condition,and the results showed that the non-uniformity of the responsivity was 4.15%,the average NETD was 28.5mK,and the operability was 99.81%.A dedicated metal micro-structure was designed and prepared on the surface of a LW MCT 1024×768(10 μm)focal plane detector chip set,and the crosstalk between pixels was characterized and analyzed.The results showed that device crosstalk was 12.3%,and the MTF was 0.35.Finally,imaging demonstrations of outdoor scene and indoor person were conducted with the detector assembly,both of which showed good imaging effect.
李雄军;姬荣斌;刘艳珍;王世锦;李培源;李红福;梁艳;李根;浦恩昌;赵鹏
昆明物理研究所,云南 昆明 650223||红外探测全国重点实验室,云南 昆明 650223昆明物理研究所,云南 昆明 650223||红外探测全国重点实验室,云南 昆明 650223昆明物理研究所,云南 昆明 650223||红外探测全国重点实验室,云南 昆明 650223陆军装备部驻重庆地区军事代表局驻昆明地区第一军代室,云南 昆明 650223昆明物理研究所,云南 昆明 650223昆明物理研究所,云南 昆明 650223昆明物理研究所,云南 昆明 650223昆明物理研究所,云南 昆明 650223昆明物理研究所,云南 昆明 650223昆明物理研究所,云南 昆明 650223||红外探测全国重点实验室,云南 昆明 650223
信息技术与安全科学
长波p-on-n碲镉汞焦平面探测器小像元中心距
LWIRp-on-nHgCdTeFPAsmall pixel pitch
《红外与毫米波学报》 2026 (3)
411-417,7
云南省科技人才与平台计划项目(202105AD160047) Supported by the Yunnan Science and Technology Talents and Platform Plan Project(202105AD160047)
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