基于MXenes/微构造硅异质结光电探调控特性研究OA
Study on regulation characteristics of photodetectors based on MX-enes/Microstructured silicon heterojunctions
表面微构造硅独特的光学特性在光电传感器、太阳能电池等领域展现出广阔应用前景.为进一步探索基于其表面结构的光电调控作用,本文报道了一种基于MXenes(Ti3C2Tx)的光电特性与微构造硅基底表面结构,通过旋涂等工艺手段,构筑硅基表面调控的新型异质结光电探测器.对比研究商用硅、微构造硅及Ti3C2Tx/微构造硅器件在不同波长/功率光辐照下的I-V特性及光电响应特性,发现Ti3C2Tx/微构造硅光电探测器在200-1750 nm波段的外量子效率和响应率均显著优于商用硅和微构造硅探测器.其中在近红外波段(1100-1750 nm),该器件也表现出更优越的性能指标,其外量子效率超1000%,响应率大于10 A/W.相比之下,同波段内商用硅探测器的外量子效率小于10%,响应率不超过0.3 A/W;微构造硅探测器的外量子效率小于15%,响应率不超过0.08 A/W.动态响应及偏压分析表明,Ti3C2Tx涂层凭借高导电率及与微构造硅形成的异质结内建电场,显著增强近红外至中红外波段探测能力,响应时间由38 ns缩短至20 ns.该异质结在光通信高速探测、激光雷达、光传感等领域展现出广阔应用前景.
Surface-microstructured silicon exhibits unique optical properties,demonstrating promising potential for ap-plications in photoelectric sensors,solar cells,and related fields.To further explore the optoelectronic modulation ef-fects based on its surface architecture,this study presents a novel heterojunction photodetector constructed by integrat-ing MXenes(Ti3C2Tx)with microstructured silicon substrate through spin-coating and other fabrication techniques.Com-parative studies were conducted on commercial silicon,microstructured silicon,and Ti3C2Tx/microstructured silicon de-vices under varying wavelengths and optical power densities.The current-voltage(I-V)characteristics and photores-ponse performance reveal that the Ti3C2Tx/microstructured silicon photodetector exhibits significantly superior external quantum efficiency(EQE)and responsivity across a broad spectral range of 200-1750 nm compared to commercial sili-con and microstructured silicon detectors.Notably,in the near-infrared region(1100-1800 nm),the device demon-strates exceptional performance,achieving EQE exceeding 1000%and responsivity greater than 10 A/W.In contrast,commercial silicon photodetector in the same spectral range shows EQE below 10%and responsivity no higher than 0.3 A/W,while microstructured silicon photodetector exhibits EQE of below 15%and responsivity limited to 0.08 A/W.Further dynamic response and bias-dependent analyses indicate that the Ti3C2Tx coating,owing to its high conductivity and the built-in electric field formed at the heterojunction with microstructured silicon,significantly enhances detection capability from the NIR to MIR.Additionally,the response time is remarkably reduced from 38 ns to 20 ns.This het-erojunction holds great promise for high-speed photodetection in optical communications,LIDAR,photoelectric sens-ing,and other advanced optoelectronic applications.
廖鹭鹭;徐彩霞;刘高睿;林长青;李璐芳;孙海彬;杨星;许龙
西南大学物理科学与技术学院,重庆 400715重庆师范大学初等教育学院,重庆 400700中国科学院上海技术物理研究所,上海 200083中国科学院上海技术物理研究所,上海 200083中国科学院上海技术物理研究所,上海 200083中国科学院上海技术物理研究所,上海 200083国防科技大学电子对抗学院/脉冲激光功率技术国家重点实验室,安徽 合肥 230037西南大学物理科学与技术学院,重庆 400715
数理科学
微构造硅MXenes光电探测器异质结
mictrostructured siliconMXenesphotodetectorheterojunction
《红外与毫米波学报》 2026 (3)
402-410,9
脉冲功率激光技术国家重点实验室开放课题(SKL2023KF40),重庆市自然科学基金(CSTB2023NSCQ-MSX0807,CSTB2024NSCQ-MSX0994),中央高校专项业务费(SWU-KU24004),浦江人才计划(No.23PJ1414800). Supported by the Open Research Fund of State Key Laboratory of Pulsed Power Laser Technology(SKL2023KF40)the Natural Science Foundation of Chongqing(CSTB2023NSCQ-MSX0807,CSTB2024NSCQ-MSX0994)the Fundamental Research Funds for the Central Uni-versities(SWU-KU24004)the Shanghai Pujiang Program(No.23PJ1414800)
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