一种基于3D打印透镜封装的宽带太赫兹准光探测器OA
A broadband terahertz quasi-optical detector based on 3D-printed lens packaging
本文提出了一种基于3D打印透镜封装的宽带太赫兹(THz)准光探测器,可覆盖220 GHz和340 GHz两个典型大气窗口.该探测器由天线耦合探测芯片和3D打印透镜组成.芯片封装于多层介质层压基板上,肖特基二极管直接集成在片上天线的馈电端口.片上集成的宽带平面蝶形天线刻蚀在石英衬底上,工作频率范围为201～360 GHz,兼具辐射器与射频(RF)扼流功能.通过引入一对电容加载环(CLLs),在不增加天线尺寸的前提下实现了带宽拓展.此外,设计并集成了高阻抗折叠低频(LF)引线,以实现对高频信号泄漏的有效抑制.通过将轻量化、低成本的3D打印透镜与嵌入于多层介质层压结构中的金属化反射器相结合,实现了单向辐射特性并提升了整体结构的机械稳定性.该探测器在200～230 GHz范围内的最大电压响应率为2200 V/W,在320～350 GHz范围内的最大电压响应率为1885 V/W,实测辐射方向图与仿真结果表现出较好的一致性.
A broadband terahertz(THz)quasi-optical detector based on 3D-printed lens packaging has been pre-sented,covering two typical atmospheric windows at 220 GHz and 340 GHz.The detector consists of an antenna-coupled detector chip and a 3D-printed lens.The chip was packaged on a multi-layer dielectric laminate,with a Schottky diode directly integrated across the feeding terminals of the on-chip antenna.The on-chip integrated broadband planar bowtie antenna was printed on a quartz substrate within the operation frequency range of 201-360 GHz,functioning as a radiator and a radio frequency(RF)choke.Bandwidth enhancement is achieved using a pair of capacitively loaded loops(CLLs)without increasing the antenna size.High-impedance folded low-fre-quency(LF)leads are incorporated to suppress high-frequency signal leakage.A lightweight,low-cost 3D-print-ed lens combined with an embedded metallized reflector enables unidirectional radiation and improved mechanical robustness.The detector achieves a maximum voltage responsivity of 2200 V/W over 200-230 GHz and 1885 V/W over 320-350 GHz.Measured radiation patterns agree well with simulations.
王兵;李明迅;吕昕
北京理工大学 集成电路与电子 毫米波与太赫兹技术北京市重点实验室,北京 100081北京傲图科技有限公司,北京 100095北京理工大学 集成电路与电子 毫米波与太赫兹技术北京市重点实验室,北京 100081
信息技术与安全科学
太赫兹(THz)准光探测器宽带集成化蝶形天线3D打印透镜肖特基二极管
terahertz(THz)quasi-optical detectorbroadbandintegrated bowtie antenna3D-printed lensSchottky diode
《红外与毫米波学报》 2026 (3)
385-392,8
Supported by the Natural Science Foundation of China(61527805)
评论