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基于黑磷油墨薄膜的中波红外探测器阵列OA

Mid-wavelength infrared detector array based on black phosphorus ink thin film

中文摘要英文摘要

中波红外成像技术在航空航天、医疗诊断和自动驾驶等领域发挥着至关重要的作用.范德华材料黑磷凭借其极高的载流子迁移率和理想的直接带隙,已被证实是构建高性能室温中波红外传感器的有力候选材料.然而,严苛的生长条件及各向异性的生长特性,限制了黑磷光电器件的发展,目前仍停留在小规模实验室演示阶段.因此,开发大规模、均匀且高性能的黑磷光电探测器阵列迫在眉睫.本研究采用室温制备技术,将大面积、均匀、低氧化的黑磷油墨薄膜沉积到薄膜晶体管上,成功研制出64×64的高性能中波红外快照式光电探测器阵列.该室温油墨制备工艺有效防止了黑磷在加工过程中的氧化,实现了低至1.12%的氧化损耗率.此外,通过梯度离心策略优化了黑磷油墨中纳米片的粒径与厚度分布,从而促进了电荷载流子的传输.该黑磷油墨薄膜阵列在中波红外波段展现出4.52 mA/W的高光响应度,像素光响应非均匀性低至10.1%.本研究为推进大规模中波红外成像技术的发展提供了一条新路径.

Mid-wavelength infrared(MWIR)imaging technology plays a crucial role in aerospace,medical diag-nostics,and autonomous driving.Van der Waals material black phosphorus(BP)exhibits exceptionally high car-rier mobility and an ideal direct bandgap,making it a proven candidate for high-performance room-temperature MWIR sensing.However,the stringent growth conditions and anisotropic growth characteristics restrict the devel-opment of BP optoelectronic devices to small-scale laboratory demonstrations.Therefore,there is an urgent need to develop large-scale,uniform,and high-performance BP photodetector arrays.This study employed a room temperature preparation technique to deposit a large-area,uniform,low-oxidation BP ink film onto thin-film tran-sistors,resulting in the development of a 64×64 high-performance MWIR snapshot photodetector array.The room temperature ink preparation process effectively prevents the oxidation of BP during fabrication,achieving an oxidation loss as low as 1.12%.In addition,a gradient centrifugation strategy was employed to optimize the later-al size and thickness distribution of the nanosheets in the BP ink,thereby facilitating the transport of charge carri-ers.The BP ink film array demonstrated a high photoresponsivity of 4.52 mA/W in the MWIR range,with pixel light response non-uniformity as low as 10.1%.This study presents a new approach for advancing large-scale MWIR imaging technology.

朱龙海;王振;胡伟达;段世坤;陈茂华;白雨卓;赵天歌;余羿叶;卫钦;徐腾飞;Martyniuk Piotrt

上海大学微电子学院,上海 201800中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083上海大学微电子学院,上海 201800||中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083南通大学微电子学院(集成电路学院),江苏 南通 226019南通大学微电子学院(集成电路学院),江苏 南通 226019Institute of Applied Physics,Military University of Technology,2 Kaliskiego St.,Warsaw 00-908,Poland

数理科学

黑磷油墨薄膜中波红外快照成像

black phosphorusink filmmid-wavelength infraredsnapshot imaging

《红外与毫米波学报》 2026 (3)

345-356,12

Supported by the National Key Research and Development Program of China(Grant Nos.2023YFB3611400 and 2025YFF0524500),the National Natural Science Foundation of China(Grant Nos.62475275,62174063,62174061,U24A20295,62404230),the China Postdoctoral Science Foundation(Grant Nos.2023TQ0362,GZB20230795,2024M753366),the Basic and Applied Basic Research Foundation of Guangdong Province(Grant No.2023B1515120049),the National Science Centre(NCN)and the National Natural Science Foundation of China(NSFC)"SHENG 3"UMO-2023/48/Q/ST7/0014(NCN)and 162361136587(NSFC).

10.11972/j.issn.1001-9014.2026.03.001

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