Continuous displacement measurement of large spot with stitched gratingsOA
Stitched gratings provide an important method to extend the grating displacement measurement range.However,the existence of stitched seams and stitching errors prevents high-precision continuous displacement measurement.This paper proposes an improved stitched grating displacement measurement method which reduces light signal intensity loss during stitching via a large spot suppression technique,ensures continuous displacement measurement using wavefront gradient modulation technology,establishes a theoretical model of the mapping between the stitched grating wavefront and the displacement measurement error,and verifies continuous displacement measurements experimentally using a single-sided Littrow optical path.Experimental results show that,based on the premise of matching the wavefront gradient index,the linear correlation between the theoretical model error and the actual measurement residual is greater than 0.9,and the corrected continuous displacement measurement residual is less than 50 nm.This verifies that the proposed method can realize high-precision continuous displacement measurement and high-stability range extension in the grating displacement measurement field.
WANG Bo;WANG Wei;YIN Zhi-yu;WANG Xin-yu;LIU Zhao-wu;LI Wen-hao;GAO Xu;LIU Lin
Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China University of Chinese Academy of Sciences,Beijing 100049,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,ChinaCollege of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,ChinaChangchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China
数理科学
grating displacement measurementgrating interferometerstitching gratingwavefront measurement
《中国光学(中英文)》 2026 (4)
P.971-982,12
国家自然科学基金(No.62435019,No.52275554,No.U21A20509,No.61227901)中国科学院青年基金专项(No.YSBR-103)中国科学院青年创新促进会专项(No.2021220)。
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