聚合物靶丸跨尺度调制结构超精密成形与检测技术研究OA

[Background]Inertial confinement fusion target capsules require high spherical-profile consistency and accurately distributed surface features.For polymer target capsules carrying cross-scale modulated structures,stable microscale material removal,tool-path stitching between the two hemispheres,full-surface profile measurement,and coupling of multi-axis motion errors remain major obstacles to submicrometer fabrication and quantitative evaluation.[Purpose]This study aims to establish an integrated ultra-precision fabrication and measurement methodology for cross-scale modulated structures on glow-discharge-polymer target capsules,with emphasis on stable material removal,equator-avoiding feature distribution,spherical-surface tool-path generation,conformal profile measurement,and motion-error separation.[Methods]A minimum uncut chip thickness model and a specific cutting energy model were established based on material-flow partitioning near the stagnation point and the elastic-plastic removal mechanism.An overall angular-offset strategy was developed to move microspherical pits away from the equatorial reversal region while maintaining their distribution uniformity.Direct-forming and spiral-trajectory machining programs were generated by transforming feature coordinates and tool paths from the mathematical spherical coordinate system to the machine-tool coordinate system.For profile measurement,single-point nanometer displacement sensing was integrated with X-Z-B-C multi-axis conformal scanning.A multi-body error-transfer model and a rotary-error separation framework were further constructed to evaluate and compensate for the effects of B-and C-axis motion errors.Typical capsule samples were subsequently fabricated and measured.[Results]The minimum uncut chip thickness of the glow discharge polymer was determined to be approximately 0.2-0.4 μm.Below this range,the specific cutting energy increased sharply,and material removal was dominated by ploughing and elastic recovery;above this range,stable cutting became more achievable.The angular-offset strategy prevented microspherical pits from crossing the equatorial stitching region without introducing the pronounced distribution nonuniformity caused by direct pit deletion.Error-transfer simulations showed that B-and C-axis angular deviations could introduce non-negligible profile errors.Experimental fabrication produced microstructures with a profile peak-to-valley value of 0.266 μm and a surface roughness Ra of 20.3 nm.Conformal scanning reconstructed the hemispherical profile of a 2-mm-diameter capsule,and the measured local microstructure profile errors were 0.146 μm and 0.152 μm.[Conclusions]The proposed framework integrates material-removal modeling,equator-avoiding feature distribution,machine-coordinate tool-path generation,conformal scanning,and motion-error compensation.It provides a feasible technical route for the submicrometer fabrication,spherical-surface measurement,and quantitative error evaluation of cross-scale modulated structures on polymer target capsules.