首页|期刊导航|电工技术学报|低气压下Au/Ag纳米粒子对LIBS信号增强差异及其真空度检测适用性研究

低气压下Au/Ag纳米粒子对LIBS信号增强差异及其真空度检测适用性研究OA

Study on the Differences in LIBS Signal Enhancement by Au/Ag Nanoparticles under Low-Pressure Conditions and Their Applicability to Vacuum Degree Detection

中文摘要英文摘要

真空度在线检测一直是制约真空开关运行可靠性提升的关键技术问题.近年来,激光诱导击穿光谱(LIBS)技术因具有非接触、响应快等优点,为真空度检测提供了新的技术路径,但传统 LIBS 在低气压条件下面临特征谱线弱、检测灵敏度不足等问题.已有研究表明,金属纳米粒子能有效增强激光诱导等离子体信号,但不同贵金属纳米粒子在低气压环境下的增强差异及其检测适用性仍不明确.为此,该文系统地比较了金(Au)、银(Ag)纳米粒子在低气压条件下对 LIBS 信号的增强特性,重点分析了特征谱线、粒子浓度与粒径敏感性、辐射积分强度、等离子体图像及真空度表征能力的变化规律.结果表明,Au/Ag 纳米粒子均可显著增强低气压下 LIBS 信号,但二者增强优势存在明显差异.Au 在 Cu 特征谱线增强及真空度拟合表征方面表现更优,其基于特征峰平均强度建立的真空度响应关系拟合优度达到 0.974 4,在较低浓度和较小粒径条件下即可获得更强的特征谱线响应;Ag 在其较优参数条件下则表现出更高的辐射积分强度和更强的整体等离子体发光能力,其拟合优度为 0.941 9,且在较高浓度和较大粒径条件下增强效果更优.研究结果表明,Au 更适用于以目标特征谱线增强和真空度表征精度为核心的检测策略,Ag 更适用于以整体辐射增强和图像表征能力为特征的检测策略.该文结果可为真空开关在线真空度检测中纳米增强材料的选取提供参考.

Online vacuum degree detection is important for assessing the operating condition of vacuum switches,while conventional laser-induced breakdown spectroscopy(LIBS)still suffers from weak characteristic spectral lines and insufficient pressure discrimination under low-pressure conditions.Metallic nanoparticles can enhance laser-induced plasma emission,but the enhancement differences between Au and Ag nanoparticles and their applicability to vacuum degree detection remain unclear.This study compares the effects of Au and Ag nanoparticles on Cu-target LIBS signals under low-pressure conditions and evaluates their suitability for characteristic-line-based and radiation-intensity-based vacuum characterization. A low-pressure LIBS experimental platform was established using a Cu target in a vacuum chamber.The pressure range was controlled from 10-4 Pa to 1 Pa.A pulsed Nd:YAG laser was focused on the Cu surface,and the plasma emission was collected by a gated optical detection system.Au and Ag nanoparticle layers with different concentrations and particle sizes were prepared on the Cu surface by spin coating to improve deposition uniformity.The Cu Ⅰ 515.3 nm and 521.8 nm lines were selected as characteristic spectral indicators.Peak intensity,enhancement factor,integral radiation intensity,plasma images,and the relationship between characteristic peak intensity and pressure were analyzed.Error bars were used to represent the standard deviations of repeated measurements,with uncertainties mainly originating from laser pulse energy fluctuation,local nanoparticle distribution,target surface morphology,and random plasma evolution. The results show that both Au and Ag nanoparticles enhance Cu characteristic line emission in the range of 10-4~1 Pa.The peak intensities of the Cu Ⅰ515.3 nm and 521.8 nm lines generally follow the order Au-enhanced LIBS>Ag-enhanced LIBS>conventional LIBS.The enhancement is reflected not only in the characteristic peaks but also in the local continuum background.Characteristic-line enhancement is related to increased laser energy deposition,enhanced Cu ablation and excitation,and local electromagnetic field enhancement induced by nanoparticles.Continuum enhancement is associated with increased electron density in the early plasma stage,which strengthens bremsstrahlung and recombination radiation. Au and Ag nanoparticles exhibit different parameter sensitivities.For Ag nanoparticles,the characteristic line intensity increases with concentration within the investigated range,indicating that higher surface coverage provides more active enhancement sites.For Au nanoparticles,stronger characteristic line emission is obtained at lower concentration,while further concentration increase may reduce the effective enhancement because of aggregation,shielding,or weakened local field coupling.Particle size also affects the two materials differently.Ag nanoparticles show stronger enhancement at 10 nm than at 5 nm,whereas Au nanoparticles exhibit higher enhancement at 5 nm than at 10 nm.The enhancement factor of 5 nm Au nanoparticles is the highest among the tested groups,especially for the CuⅠ521.8 nm line. Time-resolved integral radiation results show that Ag nanoparticles with a concentration of 0.1 mg/mL and a particle size of 10 nm produce higher overall radiation intensity and a larger luminous plasma region than the selected Au nanoparticle condition.The radiation intensity is higher at 10-3 Pa and 10-2 Pa than at 10-1 Pa and 1 Pa,and the high-radiation stage mainly appears within 100~200 ns.For vacuum characterization,the average intensity of the selected Cu peaks shows a nonlinear relationship with lg p.Quadratic fitting gives coefficients of 0.974 4 for Au and 0.941 9 for Ag,indicating that Au provides clearer characteristic-line pressure response and better pressure discrimination. Au and Ag nanoparticles therefore correspond to different enhancement pathways in low-pressure LIBS.Au is more suitable for vacuum detection based on target Cu characteristic lines and pressure fitting,while Ag is more suitable for enhancing integral radiation intensity and plasma image features.Nanoparticle material,concentration,and particle size should be selected according to the diagnostic signal used for vacuum switch monitoring.

刘佳琪;吕思濛;袁欢;杨爱军;王小华

西安交通大学电气工程学院 西安 710049西安交通大学电气工程学院 西安 710049西安交通大学电气工程学院 西安 710049西安交通大学电气工程学院 西安 710049西安交通大学电气工程学院 西安 710049

信息技术与安全科学

激光诱导击穿光谱纳米粒子增强低气压真空度检测激光诱导等离子体

Laser-induced breakdown spectroscopynanoparticle enhancementlow pressurevacuum degree detectionlaser-induced plasma

《电工技术学报》 2026 (13)

4458-4468,11

国家自然科学基金(51777154,52307184)和陕西省科学技术协会青年人才托举计划(20230459)资助项目.

10.19595/j.cnki.1000-6753.tces.260503

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