Development of a piezoresistive accelerometer with both high natural frequency and superior overload capabilityOA
Development of a piezoresistive accelerometer with both high natural frequency and superior overload capability
Yong Xia;Dejiang Lu;Libo Zhao;Xinyao Meng;Yang Lv;Xiangguang Han;Zhixia Qiao;Mingzhi Yu;Chen Jia;Qing Zhang;Ping Yang
State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai,Yantai,264000,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments,Xi'an Jiaotong University,Xi'an,710049,China||State Industry-Education Integration Center for Medical Innovations,Xi'an Jiaotong University,Xi'an,710049,China||Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai,Yantai,264000,China||Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,ChinaZhuzhou CRRC Times Electric Co.,LTD.Zhuzhou,412001,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments,Xi'an Jiaotong University,Xi'an,710049,China||State Industry-Education Integration Center for Medical Innovations,Xi'an Jiaotong University,Xi'an,710049,China||Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai,Yantai,264000,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||School of Instrument Science and Technology,Xi'an Jiaotong University,Xi'an,710049,ChinaState Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,710049,China||International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an,710049,China||School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an,710049,China
Piezoresistive accelerometerAnti-overload structuresPure-axial-stressed sensing structureNatural frequencyOverload capability
Piezoresistive accelerometerAnti-overload structuresPure-axial-stressed sensing structureNatural frequencyOverload capability
《防务技术》 2026 (7)
186-197,12
This project was partially supported by the National Key Research and Development Plan(Grant No.2024YFF0509400),the National Natural Science Foundation of China(Grant No.52305615),the Shaanxi Provincial Science and Technology Development Program(Grant Nos.2023-LL-QY-35,2024RS-CXTD-19)and the Innovative Subject of Anhui Micro-Electro-Mechanical System(MEMS)Technology Industrial Innovation Research Institute.
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