基于半导体固态开关的Marx发生器设计与实验研究OA

This paper presents a study on potting-type solid-state switches using silicon-based N-MCT semiconductor chips and proposes an RLC series discharge-based testing method for measuring key parameters such as on-state inductance,on-state resistance,and jitter of individual switches.Furthermore,an experimental three-stage Marx generator using solid-state switches is developed,where magnetic core induction is employed to achieve synchronized switch driving while providing isolation protection for the drive circuit board.In addition,high-value resistors are used to set reference potentials,balancing the voltage difference between the trigger and main electrodes to preventing internal breakdown.Experimental results show that the switch achieves an on-state inductance of 17 nH,an on-state resistance of 0.2 Ω,and a jitter of less than 0.5 ns.The three-stage Marx generator operates stably with a 5 V pulse drive,delivering 27 kV high-voltage pulses at a charging voltage of 10 kV into a 400 Ω load,with a system jitter of 0.5 ns.The system has demonstrated stable operation over 200 consecutive shots without failure.