振打式除尘器在单晶硅棒直拉工艺中的应用与优化研究OA

The mixed dust generated during the process of manufacturing c-Si rods using the CZ process is one of the core factors affecting the quality of c-Si,equipment stability,and production safety.In response to the challenges faced by traditional vibrating dust collectors,such as incomplete dust cleaning,easy damage to filter bags,and large fluctuations in furnace pressure,this paper first analyzes the working mechanism of vibrating dust collectors.Then,a deep analysis is conducted on the failure modes of the filter bag and its negative impact on the CZ process,and targeted optimization solutions are proposed from three aspects:optimization of filter bag material and structure,upgrading and application of intelligent control strategy,and safety enhancement measures for oxidation process.Finally,the future development trend of vibration dust collectors is discussed.The research results show that:1)The failure modes of filter bags mainly include three types:insufficient air permeability failure,burnout failure,and ash leakage/damage failure.2)The use of PTFE fiber filter bags can significantly improve their mechanical fatigue resistance and service life.3)The fuction based on differential pressure sensors can achieve"on-demand dust removal",avoiding unnecessary vibration and greatly extending the service life of the filter bag,while stabilizing the system pressure of dust collection chamber.4)Establishing a multiple hard interlock safety oxidation process based on dust collection chamber temperature,oxidation time,and oxygen concentration is a fundamental technical measure to eliminate the risk of silicon powder explosion and ensure personal and equipment safety.