金属有机框架材料吸附分离CF4和NF3的研究进展OA

CF4 and NF3 are two important fluorinated electronic specialty gases,but due to their similar properties,the purification and separation are challenging.As a novel adsorbent with adjustable pore structure,the metal organic framework(MOF)materials are widely used for selective adsorption of gases.The research progress on various MOF materials applied to the adsorption and separation of CF4 and NF3 was reviewed.The adsorption capacity,CF4/N2 and NF3/N2 adsorption selectivities and cycle life of various MOF materials were summarized.And the effects of pore diameter,Lewis acidity of metal centers,electron donating ability of ligand substituents and other key factors on the adsorption performance were analyzed.Based on this,further research progress was explored on the removal of trace amounts of NF3 from CF4 and trace amounts of CF4 from NF3 by MOF materials.High throughput calculations can not only quickly obtain the adsorption performance of various MOF materials,but also provide guidance for the design and optimization of target MOF materials.Finally,the shortcomings of existing MOF materials in the adsorption and separation of CF4 and NF3 were analyzed,and the future research and development directions were discussed.