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超薄铍窗X射线管的研制OA

Development of ultra-thin beryllium window X-ray tubes

中文摘要英文摘要

低能 X射线谱在荧光分析等检测中对轻元素表征不可或缺,为了减少对低能 X射线剂量的吸收、提高使用效率,一般采用原子序数低的材料作为 X射线的透射窗,其中最为常用的就是铍箔.目前荧光分析X射线管主要采用 100~200 μm的铍箔作为 X射线出射窗,其对数 keV的 X射线透过率较低,严重制约了对轻元素的荧光检测分析能力.本文通过蒙特卡洛仿真分析发现,30 μm铍箔对能量低于 5 keV的 X射线的透过率相比 200 μm厚铍箔可以提高约 67%,可以有效提高轻元素的检测分析能力.因此本文研制了一种 30 μm厚的超薄铍窗,其漏率≤2.7×10-11 Pa·m3·s-1,达到了射线管的使用要求;并以此研制了一款荧光分析用的封离式 X射线管,其最大工作电压 100 kV,最大功率 100 W,焦斑约为 0.74 mm×0.83 mm,能谱特征表现为典型的韧致辐射连续谱与钨靶特征 X射线;并对其进行了 100 W长时间连续运行的可靠性测试,测试期间射线管电流稳定,无高压打火,具备长期稳定工作的可靠性.

[Background]Low-energy X-ray spectra are essential for the characterization of light elements in X-ray fluorescence(XRF)analysis and other related measurement techniques.To minimize the absorption of low-energy X-rays and improve their utilization efficiency,low-atomic-number materials are typically employed as X-ray transmission windows,among which beryllium(Be)foil is the most widely used.[Purpose]This paper aims to develop an X-ray tube equipped with an ultra-thin beryllium window with a thickness of 30 μm,and investigate its performance including X-ray transmission characteristics,spectral features and operational reliability.[Methods]A sealed-off 100 kV X-ray tube with a 30 μm ultra-thin beryllium window was designed,fabricated and experimentally tested.X-ray transmittance,focal spot and beam current were analyzed via numerical simulation.Vacuum brazing and vacuum baking processes were adopted to ensure the welding tightness of the beryllium window and long-term vacuum stability inside the tube.Prototyped X-ray tubes were tested in terms of focal spot,beam current and energy spectrum,and an 8-hour continuous operation experiment was carried out to evaluate the long-term operational reliability of the X-ray tube.[Results]A 100 kV X-ray tube with a 30 μm ultra-thin beryllium window was successfully developed.Simulation results show that for soft X-rays in the energy range of 1-5 keV,the transmittance of the 30 μm beryllium window is approximately 67%higher than that of a conventional 200 μm beryllium window.Performance tests indicate that the X-ray tube achieves a tube current of 1 mA and an output power of 100 W at a filament operating current of 2.07 A,with a focal spot size of 0.74 mm×0.83 mm.The obtained X-ray spectrum presents typical continuous bremsstrahlung radiation together with characteristic X-ray lines of the tungsten target.The 8-hour long-term reliability test demonstrates that the ultra-thin beryllium window X-ray tube operates steadily without failure,arcing or overcurrent,and the tube current remains stable during continuous operation.[Conclusions]The X-ray tube with a 30 μm ultra-thin beryllium window remarkably optimizes the transmission performance of soft X rays.Comprehensive performance indicators,including filament current,focal spot size and spectral characteristics,satisfy the application requirements of fluorescence analysis under high-power and high-voltage operating conditions.No performance degradation is observed after the experiment,verifying excellent long-term operational stability and reliability of the device.

陈欣;李天涛;何小中;赵伟;杨洁;李建北;秦臻;李晨;刘平;黄刚;向军

中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900四川华束科技有限公司,四川 成都 610041中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900中国工程物理研究院 流体物理研究所,冲击波物理与爆轰物理全国重点实验室,四川 绵阳 621900

信息技术与安全科学

超薄铍窗荧光分析X射线管漏率X射线透过率

ultra-thin beryllium windowfluorescence analysisX-ray tubeleakage rateX-ray transmittance

《强激光与粒子束》 2026 (7)

182-187,6

中央引导地方资金科技创新基地项目(2025ZYDF018)

10.11884/HPLPB202638.250483

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