电子器件微结构模具的超精密加工误差补偿与动态控制方法OA
Ultra precision machining error compensation and dynamic control method for mi-crostructure molds of electronic devices
超精密加工技术是高端制造领域的一项关键技术,掌握超精密加工误差控制关键技术、保障并提高数控机床的加工精度,已经成为提高加工制造水平的研究热点.热变形引起的误差是影响数控机床精度的主要因素之一.为了进一步提高机床热误差预测的精度,本文提出一种基于差分融合长短期记忆神经网络(DF-LSTM)的数控机床热误差预测模型.该模型引入差分预测,并与直接预测相结合,旨在有效平衡待预测数据的趋势性和波动性.同时,针对神经网络算法较多,但补偿效果仍存差距的问题,本文设计了遗传算法(GA)与 BP 神经网络(BPNN)结合的热误差优化模型(GA-BPNN),利用 GA 的全局搜索能力优化 BPNN 的初始权值与阈值,从而显著提升补偿精度与模型收敛速度.仿真结果表明,DF-LSTM能够提升误差预测精度;GA-BPNN能够降低模具的热误差.
Ultra precision machining technology is a key technology in the high-end manufacturing field.Mastering the key technology of ultra precision machining error control,ensuring and improving the machining accuracy of CNC machine tools,has become a research hotspot for improving the level of machining and manufacturing.The error caused by thermal deformation is one of the main factors affecting the accuracy of CNC machine tools.In order to further improve the accuracy of thermal error prediction for machine tools,this paper proposes a numerical control machine tool thermal error prediction model based on differential fusion long short-term memory neural network(DF-LSTM).This model introduces differential prediction and combines it with direct prediction,aiming to effectively balance the trend and volatility of the data to be predicted.At the same time,in response to the problem that there are many neural network algorithms but there is still a gap in compensation effectiveness,this paper designs a thermal error optimization model(GA-BPNN)combining genetic algorithm(GA)and BP neural network(BPNN),which utilizes GA's global search ability to optimize the initial weights and thresholds of BPNN,thereby significantly improving compensation accuracy and model convergence speed.The simulation results show that DF-LSTM can improve the accuracy of error prediction;GA-BPNN can reduce the thermal error of molds.
谢宝成
陕西机电职业技术学院,陕西 宝鸡 721001
矿业与冶金
电子器件微结构模具超精密加工误差补偿动态控制
electronic devicemicrostructure moldultra precision machiningerror compensationdynamic control
《模具技术》 2026 (2)
14-20,7
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