Study on the thermo-electromechanical coupling model of the dual-channel microwave power detection chipOA

作者：Ruifeng Li;Debo Wang

作者单位：College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,ChinaCollege of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China

中文关键词：MEMSthermo-electromechanical couplingsensitivitymicrowave power detectioncantilever beam

英文关键词：MEMSthermo-electromechanical couplingsensitivitymicrowave power detectioncantilever beam

刊名：《半导体学报（英文版）》 2026 (6)

页码/页数：94-103,10

基金：This work was supported by the National Natural Sci-ence Foundation of China(61904089),the Province Natural Sci-ence Foundation of Jiangsu(BK20190731).

DOI：10.1088/1674-4926/25120026