基于设备检定的透射电镜测距系统OA
Transmitted electron microscope distance measurement system based on equipment calibration
在透射电镜设备检定过程中,当采用手工测量方式对标准试样图像拍摄结果进行测距时,测量结果易产生较大误差.设计并开发了透射电镜图像距离测量系统,该系统主要包含3个核心模块:测量结果灰度信息统计模块主要用于实现透射电镜初始图像灰度级对应像素数的分析功能;标尺换算与分析模块是基于图像灰度信息特征,对透射电镜采集的原始图像进行灰度变换与分析的,以增强图像标尺区域的信息,通过选取标尺区域,自动完成像素与实际距离的换算;距离测量与分析模块通过对初始图像进行灰度变换,增强标准试样待测量区域的图像信息,借助目标测量功能,实现不同放大倍数条件下透射电镜条纹图像中亮/暗条纹的距离测量.基于上述透射电镜测距系统的开发,采用标尺分析、自动化测量及全流程图像处理与分析方法,显著降低了人为测距的不确定性,将测量误差控制为小于5%,有效提高了透射电镜设备检定分析的效率与精度.
In the calibration process of transmission electron microscope equipment,when used manual measurement to measure the distance of standard sample image,the measurement results were prone to significant errors.A transmission electron microscope image distance measurement system was designed and developed,consisting of three core modules.The grayscale information statistics module primarily analyzed the pixel count corresponding to grayscale levels in transmission electron microscope initial images.The scale conversion and analysis module performs grayscale transformation and analysis on raw transmission electron microscope images based on grayscale feature characteristics to enhance scale region information,enabling automatic pixel-to-actual distance conversion by selecting the scale area.The distance measurement and analysis module enhanced the image information of standard sample measurement regions through grayscale transformation of initial images,achieved distance measurement of light/dark stripes in transmission electron microscope fringe images under different magnifications via target measurement functions.Based on the development of this transmission electron microscope distance measurement system,the application of scale analysis,automated measurement,and full-process image processing and analysis methods significantly reduced uncertainty of manud distance measurement,keep measurement errors less than 5%,thereby effectively improved the efficiency and accuracy of transmission electron microscope equipment calibration analysis.
马晓丽;徐楚君;武湘豫;李晓玲
上海交通大学 材料科学与工程学院,上海 200240上海交通大学 材料科学与工程学院,上海 200240上海交通大学 材料科学与工程学院,上海 200240上海交通大学 材料科学与工程学院,上海 200240
机械制造
设备检定透射电镜距离测量图像处理标尺换算
equipment calibrationtransmission electron microscopydistance measurementimage processingscale conversion
《理化检验-物理分册》 2026 (6)
38-41,4
上海交通大学决策咨询课题(JCZXSJB2024-26)
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