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硅基光栅型法布里珀罗-微环耦合谐振腔的传输特性OA

Transmission characteristics of silicon-based grating-type Fabry-Perot-microring coupled resonators

中文摘要英文摘要

本文针对一种由微环谐振腔与法布里-珀罗腔耦合构成的集成结构,开展了传输光谱特性的理论与实验研究.该结构通过在单边耦合型微环的直波导中引入光栅反射镜形成法布里-珀罗腔,在双谐振结构中实现了新颖的多腔耦合传输谱形.成功建立系统理论模型后,分析了多腔耦合传输谱形出现的条件并进行了器件参数优化.在硅基芯片上成功制备了光栅型法布里珀罗-微环耦合谐振腔器件,首次观测到与理论预测一致的多腔耦合传输谱形,包括嵌套类电磁感应透明和双法诺共振线形.实验结果表明,在 3.43 dB/cm的波导损耗条件下,电磁感应透明的中心峰可实现 1.40×104 的品质因子,双法诺共振的斜率最高可达到 37.70 dB/nm.研究结果为集成光子耦合谐振系统的机理理解提供了新视角,并为实现高集成度、高性能的光子器件平台提供了可行技术路径,在高灵敏光学传感、窄带滤波及高速调制等领域具有重要的应用潜力.

This paper presents comprehensive theoretical and experimental investigations on the transmis-sion spectral characteristics of an integrated photonic structure consisting of a microring resonator coupled with a Fabry-Perot(FP)cavity.The FP cavity is realized by introducing a grating reflector into the straight waveguide of a single-side-coupled microring.Within this dual-resonator configuration,novel multi-cavity coupled transmission spectra are achieved.A systematic theoretical model is established to analyze the condi-tions under which these multi-cavity coupled spectral profiles appear,and the structural parameters are sub-sequently optimized.A grating-type Fabry-Perot-microring coupled resonator device was successfully fab-ricated on a silicon-on-insulator(SOI)platform.For the first time,multi-cavity coupled transmission spectra consistent with theoretical predictions were experimentally observed,including nested electromagnetically induced transparency(EIT)-like and double Fano resonance line shapes.Experimental measurements indic-ate that,under a waveguide loss of 3.43 dB/cm,the EIT central peak exhibits a quality factor of 1.40×104,while the slope of the double Fano resonance reaches 37.70 dB/nm.These results provide new insight into the underlying mechanisms of integrated photonic coupled resonator systems and demonstrate a viable ap-proach toward highly integrated,high-performance photonic device platforms.The proposed structure shows strong potential for applications in high-sensitivity optical sensing,narrowband filtering,and high-speed modulation.

李拓航;周笑艳;张林

天津大学 精密测试技术及仪器全国重点实验室 精密仪器与光电子工程学院,天津 300000天津大学 精密测试技术及仪器全国重点实验室 精密仪器与光电子工程学院,天津 300000天津大学 精密测试技术及仪器全国重点实验室 精密仪器与光电子工程学院,天津 300000

信息技术与安全科学

微环谐振腔法布里-珀罗腔耦合谐振腔电磁诱导透明

microring resonatorFabry-Perot cavitycoupled resonatorselectromagnetically induced trans-parency

《中国光学(中英文)》 2026 (3)

469-478,10

"量子通信与量子计算机"国家科技重大专项(No.2024ZD0300802)Supported by Quantum Science and Technology National Science and Technology Major Project(No.2024ZD0300802)

10.37188/CO.2025-0129

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