激光聚变X射线诊断用高精度多层膜器件与系统技术OA

[Backgrounds]Multilayer film optics allow for the accurate characterization of high-energy-density plasmas produced in ICF implosions by capturing critical information—temporal,spatial,and spectral—of X rays,thereby enabling dynamic monitoring of the target.Such comprehensive diagnostics are essential for validating numerical models and understanding the key physics that ultimately determine implosion performance.[Purpose]To address critical X-ray diagnostic applications in ICF research,this paper presents the design,fabrication,characterization,and implementation of high-performance multilayer film optics and systems capable of achieving imaging resolution better than 5 μm,including three critical components:Kirkpatrick-Baez(KB)mirrors,off-axis aspheric mirrors,and Wolter microscopes.[Methods]Key advancements were achieved in X-ray optics,ranging from multi-channel KB mirrors for dual-mode diagnostics,precision-manufactured off-axis aspheres,and comprehensively engineered Wolter microscopes.[Results]Key achievements include a spatial resolution of sub-5 μm using the multi-channel KB mirror system,an exceptional surface figure of 1.56 nm RMS and roughness<0.3 nm on a 50 mm length off-axis asphere via ion beam figuring,and the successful implementation of a full-process methodology for Wolter microscopes.[Conclusions]Breakthroughs in the high-precision manufacturing of multilayer film optics and systems will provide robust technical support for plasma diagnostics in domestic ICF experiments.