多通道彩色共聚焦成像系统研究OA
Research on a multi-channel chromatic confocal imaging system
针对传统点扫描彩色共聚焦三维成像技术中存在的扫描速度慢、系统复杂度高的问题,提出一种基于光纤阵列与振镜光路切换的多点同步成像系统.该系统以32通道一维光纤阵列作为探测核心,结合高数值孔径色散透镜与高速振镜切换机制,实现了多测点快速采集与高精度形貌重建;通过提出的峰值搜索算法,有效提升了波长定位的准确性.标定结果表明,该系统工作在580 nm波长处的纵向精度达0.14 µm,工作在450～700 nm波长范围内的纵向精度为2.46 µm.在此基础上,成功将该系统应用于集成电路的微观形貌检测.该系统在保持高分辨率的同时,显著提高了测量效率,具有良好的工业在线应用潜力.
To address the limitations of slow scanning speed and high system complexity in traditional point-scanning chromatic confocal three-dimensional imaging technology,a multi-point synchronous imaging system based on fiber array and galvanometer-based optical switching mechanism is proposed.The system employs a 32-channel one-dimensional fiber array as the detection core,combined with a high-numerical-aperture dispersive lens and a high-speed galvanometer,to achieve rapid multi-point data acquisition and high-precision topographic reconstruction.Furthermore,a peak-search algorithm is proposed to effectively enhance the accuracy of wavelength determination of the system.The calibration results demonstrate that the system has a longitudinal accuracy of 0.14 µm at 580 nm and 2.46 µm across the working spectral range of 450-700 nm.Based on this,the system has been successfully applied to the inspection of integrated circuit micro-topography.This system significantly improves measurement efficiency while maintaining high resolution,showing strong potential for industrial online applications.
池田贵一;臧昊峰;鲁拥华;王沛
中国科学技术大学光学与光学工程系,安徽 合肥 230026||安徽省光电子科学与技术重点实验室,安徽 合肥 230026中国科学技术大学光学与光学工程系,安徽 合肥 230026||安徽省光电子科学与技术重点实验室,安徽 合肥 230026中国科学技术大学光学与光学工程系,安徽 合肥 230026||安徽省光电子科学与技术重点实验室,安徽 合肥 230026中国科学技术大学光学与光学工程系,安徽 合肥 230026||安徽省光电子科学与技术重点实验室,安徽 合肥 230026
数理科学
彩色共聚焦测量三维形貌检测光纤阵列光纤切换器
chromatic confocal measurementthree-dimensional topography detectionfiber arrayoptical fiber switching
《量子电子学报》 2026 (3)
375-383,9
国家重点研发计划(2023YFF0715501,2023YFF0715502),安徽省科技创新攻坚计划(202423k09020046),国家自然科学基金青年项目(C类,62505307),中央高校基本科研业务费专项(WK2030000092)
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