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HTCC腔体成型工艺改善研究OA

Study on the Improvement of HTCC Cavity Molding Process

中文摘要英文摘要

针对高温共烧陶瓷(HTCC)腔体在成型过程中易形变的普遍性问题,提出一种"分步预压后合体层压+内缩聚对苯二甲酸乙二醇酯(PET)膜"的组合方法,使在面对不同腔体结构成型问题时能够以一种通用的手段对腔体问题进行改善.同时,对预压压力和内缩距离进行了优化,有效掌握了腔体制造工艺技术,保证了腔体成型效果,腔体平面度控制在20μm以内.采用该方法制作的产品能满足可靠性验证方面的要求,为腔体成型提供了依据.

To address the common issue of deformation in high-temperature co-fired ceramic(HTCC)cavities during the molding process,a combined method featuring"stepwise pre-pressing followed by assembly lamination"and a"retracted polyethylene terephthalate(PET)film"technique is proposed.This approach provides a universal solution for improving cavity performance when dealing with forming challenges associated with various cavity structures.At the same time,the pre-pressing pressure and retraction distance are optimized,effectively mastering the cavity manufacturing process technology and ensuring molding quality.Consequently,the cavity surface flatness is controlled within 20 μm.The products fabricated using this method meet the requirements of reliability verification,which provides a valuable reference for cavity molding.

张勇;高彩晋;杨兴宇;任耀华

中国电子科技集团公司第二研究所,太原 030024中国电子科技集团公司第二研究所,太原 030024中国电子科技集团公司第二研究所,太原 030024中国电子科技集团公司第二研究所,太原 030024

信息技术与安全科学

HTCC腔体成型预压内缩PET膜

HTCCcavity moldingpre-pressingretracted PET film

《电子与封装》 2026 (5)

7-12,6

10.16257/j.cnki.1681-1070.2026.0051

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