首页|期刊导航|人工晶体学报|体缺陷主导的少子寿命衰减:光伏用n型Cz硅片高温行为机理与抑制策略

体缺陷主导的少子寿命衰减:光伏用n型Cz硅片高温行为机理与抑制策略OA

Bulk-Defect Dominated Minority Carrier Degradation:Mechanisms and Suppression Strategies for High-Temperature Behavior of Photovoltaic n-Type Czochralski Silicon Wafers

中文摘要英文摘要

硅片少子寿命在经历光伏电池高温工艺后普遍出现急剧衰减,这严重制约了电池效率的进一步提升.为阐明其潜在机理,本研究通过系统的热处理实验,结合少子寿命、光致发光(PL)、傅里叶变换红外光谱等表征手段,对光伏用n型直拉(Cz)硅片的高温行为进行了研究.结果表明,高温处理导致的少子寿命与PL强度大幅衰减主要源于体复合缺陷的显著增加,与表面状态及工艺气氛关联较弱.此外,热处理过程中硅片内间隙氧向沉淀氧转化,且在氧气氛围下伴有环境氧的净渗入.综合分析表明,原生硅片中存在的氧沉淀胚核在高温工艺中被激活并生长,形成具有高复合活性的氧沉淀,这是导致少子寿命衰减的主要原因.基于"氧沉淀胚核选择性激活与生长"的机理,本研究提出通过优化晶体冷却热历史抑制胚核生成,以及利用快速热退火消融已有缺陷的两种优化策略.

The minority carrier lifetime of silicon wafers generally decays sharply after high-temperature processes in solar cell fabrication,significantly limiting further improvements in cell efficiency.To elucidate the underlying mechanism,this study systematically investigated the high-temperature behavior of photovoltaic-grade n-type Czochralski(Cz)silicon wafers through controlled heat treatment experiments,combined with multi-scale characterization techniques including minority carrier lifetime,photoluminescence(PL),and Fourier-transform infrared spectroscopy.The results demonstrate that the significant degradation in both minority carrier lifetime and PL intensity after high-temperature treatment primarily stems from a substantial increase in bulk recombination defects,with surface conditions and process atmosphere playing a minor role.Furthermore,during heat treatment,interstitial oxygen within the silicon wafer converts into precipitated oxygen,accompanied by net inward diffusion of ambient oxygen in an oxygen-rich atmosphere.Comprehensive analysis indicates that oxygen precipitate nuclei pre-existing in the as-grown silicon wafers become activated and grow during high-temperature process,forming oxygen precipitates with high recombination activity,which is identified as the main cause of minority carrier lifetime degradation.Based on the mechanism of'selective activation and growth of oxygen precipitate nuclei',this study proposes two optimization strategies:suppressing nucleus formation by optimizing the crystal cooling thermal history and eliminating existing defects through rapid thermal annealing.

王鹏飞;张远方;欧子杨;王钊;陈占仓;林瑶

晶科能源股份有限公司,上饶 334100晶科能源股份有限公司,上饶 334100晶科能源股份有限公司,上饶 334100晶科能源股份有限公司,上饶 334100晶科能源股份有限公司,上饶 334100晶科能源(上饶)有限公司,上饶 333000

数理科学

n型直拉硅少子寿命高温衰减氧沉淀快速热退火

n-type Czochralski siliconminority carrier lifetimehigh-temperature degradationoxygen precipitaterapid thermal annealing

《人工晶体学报》 2026 (4)

619-626,8

江西省重点研发计划(20243BBI91002)

10.16553/j.cnki.issn1000-985x.2025.0259

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