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高衍射效率声光调制器的设计与实现OA

Design and Implementation of Acousto-Optic Modulator with High Diffraction Efficiency

中文摘要英文摘要

本文系统设计、制备和验证了一款具有高衍射效率、大孔径的声光调制器(AOM),该AOM的工作波长设计为1 064 nm,有效孔径为10 mm,工作中心频率为80 MHz,并选用低吸收石英作为声光介质,高效铌酸锂作为压电换能器.同时,本文完成优化设计及键合工艺,结合压块贴片导热、导电方案,实现了98.4%的衍射效率,该AOM同时具备优秀的光束质量和光束指向稳定性.本研究为高功率激光应用提供了关键的高性能光学器件.

This paper introduces an acousto-optic modulator(AOM)featuring high diffraction efficiency and a large aperture.The AOM is designed for operation at 1 064 nm,with an effective aperture of 10 mm and a center operating frequency of 80 MHz.Low-absorption quartz was selected as the acousto-optic medium,while high-efficiency lithium niobate served as the piezoelectric transducer.Through optimized design and bonding processes,combined with a heat-conductive and electrically conductive heat dissipation solution utilizing a pressure block and adhesive pad,a diffraction efficiency of 98.4%was achieved.This AOM simultaneously exhibits excellent outstanding beam quality and high beam pointing stability.The research provides a critical high-performance optical component for high-power laser applications.

王城强;许智宏;邹林儿;卢浩;王帅华;吴少凡

福建福晶科技股份有限公司,福州 350003||南昌大学物理与材料学院,南昌 330031福建福晶科技股份有限公司,福州 350003南昌大学物理与材料学院,南昌 330031中国科学院福建物质结构研究所,福州 350003中国科学院福建物质结构研究所,福州 350003中国科学院福建物质结构研究所,福州 350003

数理科学

衍射效率声光调制器声光介质石英晶体压电换能器铌酸锂压块贴片导热

diffraction efficiencyacousto-optic modulatoracousto-optic mediumquartz crystalpiezoelectric transducerlithium niobatepressure block patch thermal conduction

《人工晶体学报》 2026 (4)

594-602,9

闽都创新实验室产学研融合发展专项(2024CXY109)福建省工业领域区域发展项目(2024H4001)福州市联合创新项目(2025-SG-015)国家自然基金委NSAF联合基金(U2530205)

10.16553/j.cnki.issn1000-985x.2025.0233

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