六自由度运动原位测量机构的降维任务空间插值精度补偿方法OA

To trace the six-degree-of-freedom(6-DOF)measurement results back to high-precision one-dimensional laser interferometry,a non-kinematic calibration-based dimensionality-reduced task-space interpolation compensation method is proposed.Specifically,linear and angular errors of each degree of freedom are measured using a high-precision one-dimensional laser interferometer,and the residual pose errors at multiple discrete points within the task space are obtained.A fuzzy inference system(FIS)is established to predict and compensate residual errors across arbitrary pose points in the task space.Experimental results show that the proposed method reduces the root mean square errors(eRMS)of 6-DOF position and orientation measurements to 1 μm and 10 μrad,corresponding to improvements of 77.98%and 86.34%in measurement accuracy,respectively.