基于抗磁悬浮的微型平面电机驱控设计OA

To address the limitations of continuous motion and complex drive structures in permanent mag-net type diamagnetically levitated micro planar motors,this paper proposed a single-sided driven three-de-gree-of-freedom(3-DOF)micro-actuator with a PM array.This design achieved a unified approach to structural simplification and multi-DOF decoupled control.The system employed ultra-thin flexible print-ed circuit(FPC)serpentine coils to generate an adjustable magnetic field via four independent current chan-nels.Based on magnetic field analysis and an equivalent magnetic dipole model,a mathematical model be-tween current and electromagnetic force was established,forming a 3-DOF open-loop decoupling control method.Experimental results demonstrate stable 3-DOF motion covering a wide XY-plane area of 7 mm×7 mm,while maintaining good linearity throughout the range.The positioning accuracy achieves±8.232 μm and repeatability is±5.690 μm.By finely adjusting the driving current,the system achieves a Z-axis resolution of 0.95 μm and a displacement adjustment range of approximately 23 μm.Compared to conventional active magnetic levitation platforms,this structure reduces volume by more than an order of magnitude,significantly lowers current requirements and manufacturing costs,and demonstrates excellent potential for high-precision micro-positioning applications.