光学元件六自由度位姿高精度检测方法OA

To meet the demand for nanometer-level displacement and microradian-level angular high-preci-sion measurement of optical components in fields such as lithography systems,precision assembly,and space optics,and to address the limitations of existing methods in achieving multi-degree-of-freedom(DOF)synchronous and integrated measurement,this paper proposed and experimentally validated a mea-surement system based on multi-channel differential laser interferometry.By designing a seven-channel in-terferometer configuration and establishing a unified mathematical model,simultaneous solving of six-DOF pose parameters—including translational displacements and rotational angles—of optical components was realized.Simulation results indicated that,under ideal conditions,the root-mean-square(RMS)er-rors of translational measurements in the X,Y,and Z directions were better than 3.384 nm,while the an-gular measurement errors did not exceed 4.616 μrad.Experimental verification demonstrated that,in a static environment,the RMS stability of displacement and angular measurements reached 7 nm and 16.4 μrad,respectively.Under step inputs of-300 μrad and-500 μrad,the linear correlation coefficients be-tween the system outputs and autocollimator reference values were 0.984 and 0.937,respectively,with residual RMS errors maintained within 44 μrad.The proposed system featured a compact structure,strong resistance to environmental disturbances,and high linearity,making it suitable for real-time pose monitoring in high-precision applications.Future work will focus on multi-DOF coupling error calibration and adaptability un-der dynamic environments to further enhance the practicality and reliability of the system.