自主可控的功率半导体器件仿真工具研发进展(二):三维计算的精度OA

Power semiconductor devices are the core components of power electronic equipment.China is highly de-pendent on imports for simulation softwares of semiconductor devices TCAD(technology computer aided design).Based on the technical accumulation of 2D simulation tool development since 2019,we has independently developed a 3D sim-ulation tool for power semiconductor devices.This paper analyzes the main challenges of 3D simulations for power semiconductor devices compared with 2D simulations,including the increase in the number of degrees of freedom,the complexity in extending control volume construction and the difficulty in accurately computing the geometric coefficients.Meanwhile,the key points are elaborated,including the construction of polyhedral control volumes,the 3D extension of the Scharfetter-Gummel scheme based on the finite volume method,and highly accurate geometric coefficient calcula-tions.Systematic comparisons of simulation results are conducted with the commercial software Synopsys TCAD Sentaurus Device under the conditions of various device types,operating conditions,and circuit topologies.The simula-tion results of the developed 3D tool,including the steady-state microscopic physical quantities and transient switching characteristics,are in high agreement with those of the commercial software,which verifies the accuracy of the inde-pendently developed 3D simulation tool.