微机械陀螺检测单元的阵列设计与动力学分析OA
Array Design and Dynamic Analysis of Micromachined Gyro Detection Unit
为解决多自由度微陀螺的带宽和增益之间的矛盾问题,针对一类具有单自由度驱动系统和完全二自由度检测系统的三自由度微陀螺,对其检测单元进行阵列设计.通过求解阵列微陀螺系统的动力学方程,研究线性与非线性条件下,不同参数对阵列陀螺仪增益与带宽性能的影响.结果表明,与非阵列陀螺仪相比,在带宽不变的情况下,阵列陀螺仪实现了增益的成倍提高,同时讨论了线性以及非线性情况下加工误差对阵列微陀螺检测性能的影响规律.
To solve the contradiction between bandwidth and gain of multi-degree-of-freedom of micro-gyroscopes,an array design of sensing element for a class of three-degree-of-freedom micro-gyroscope with a single-degree-of-freedom driving system and a complete two-degree-of-freedom sensing system is performed.Then,the effects of different parameters on the gain and bandwidth performance of the array micro-gyroscope are investigated by solving the dynamical equations of the system under linear and nonlinear conditions.The results show that compared with the non-array gyroscope,the array gyroscope achieves a multiplier increase in gain with a constant band-width.The effect of manufacturing process errors on the detection performance of the array micro-gyroscope in linear and nonlinear cases is also considered.
郝淑英;贾沁洪;张昆鹏;王赛
天津理工大学天津市先进机电系统设计与智能控制重点实验室,天津 300384||天津理工大学机电工程国家级实验教学示范中心,天津 300384天津理工大学天津市先进机电系统设计与智能控制重点实验室,天津 300384||天津理工大学机电工程国家级实验教学示范中心,天津 300384天津理工大学天津市先进机电系统设计与智能控制重点实验室,天津 300384||天津理工大学机电工程国家级实验教学示范中心,天津 300384天津理工大学天津市先进机电系统设计与智能控制重点实验室,天津 300384||天津理工大学机电工程国家级实验教学示范中心,天津 300384
数理科学
非线性微陀螺阵列设计增益带宽
nonelinear micro-gyroarray designgainbandwidth
《传感技术学报》 2026 (4)
747-752,6
国家自然科学基金项目(12072234)
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