考虑旋转梯度效应的弹性薄膜黏附接触行为研究OA
Adhesive Contact Behavior of Elastic Thin Films Involving Rotational Gradient Effects
针对微机电系统等微纳尺度器件中黏附与尺度效应耦合的关键力学问题,建立了一个考虑尺度效应的弹性球体与薄膜黏附接触半解析模型.首先,采用偶应力理论描述材料尺度效应,并结合Maugis-Dugdale黏附模型确定了界面应力;然后,运用黏附共轭梯度法与离散卷积-快速傅里叶变换技术求解压力分布与表面变形;最后,系统探讨了薄膜厚度、特征材料长度、剪切模量比及黏附参数对弹性薄膜黏附接触行为的影响.结果表明,黏附参数固定时,增大特征材料长度、减小薄膜厚度或剪切模量比,均会使接触压力峰值升高,压缩与拉伸变形均减小,表现为接触刚度增强,并显著影响拉脱力.特别地,当薄膜无量纲厚度为2时,拉脱力随特征材料长度增加呈先减小后增大的趋势,并在无量纲特征材料长度大于3后趋于稳定;薄膜越薄,拉脱力越大,且特征材料长度对其影响范围越窄.当无量纲厚度小于1时,拉脱力在特征材料长度约0.25处达到极小值后保持稳定.本研究结果为微纳薄膜结构的黏附控制与力学设计提供了理论参考.
To address the critical mechanical issue of coupled adhesion and size effects in micro-scale devices such as micro-electromechanical systems(MEMS),this study establishes a semi-analytical adhesive contact model between an elastic sphere and a thin film,incorporating size effects.The material size effect is characterized using couple stress theory,while the interfacial adhesive stress is described via the Maugis-Dugdale adhesive model.The pressure distribution and surface deformation are solved using the adhesive-driven conjugate gradient method combined with the discrete convolution-fast Fourier transform(DC-FFT)technique.The influences of film thickness,characteristic material length,shear modulus ratio,and adhesive parameters on the adhesive contact behavior of elatic thin films are systematically investigated.The results show that,under a fixed adhesive parameter,an increase in the characteristic material length or a decrease in either the film thickness or the shear modulus ratio leads to an increase in the peak contact pressure,a reduction in both compressive and tensile deformation—indicating enhanced contact stiffness—and a significant effect on the pull-off force.Specifically,when the dimensionless film thickness is 2,the pull-off force first decreases and then increases with increasing characteristic material length,stabilizing when the dimensionless characteristic length exceeds 3.Thinner films exhibit a larger pull-off force,and the influence range of the characteristic material length on the pull-off force narrows.For a dimensionless thickness less than 1,the pull-off force reaches a minimum at a characteristic material length around 0.25 and then remains stable.This study provides a theoretical foundation for the adhesive control and mechanical design of micro/nano-film structures.
叶秀桦;王宇星;沈火明;张郭勇
西南交通大学力学与航空航天学院,四川 成都 611756西南交通大学力学与航空航天学院,四川 成都 611756||西南交通大学机械工程学院,四川 成都 611756西南交通大学力学与航空航天学院,四川 成都 611756||成都信息工程大学,四川 成都 610225中国电子科技集团第十研究院,四川 成都 610036
数理科学
弹性薄膜黏附接触尺度效应半解析法黏附共轭梯度法偶应力理论
elastic thin filmadhesive contactscale effectsemi-analytical methodadhesion-driven conjugate gradient methodcouple stress theory
《四川轻化工大学学报(自然科学版)》 2026 (2)
1-12,12
国家自然科学基金项目(12402113)四川省自然科学基金项目(2023NSFSC13002024NSFSC0037)
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