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一种三维大气压微波等离子体装置高效设计的数值计算模型OA

A Numerical Calculation Model for Efficient Design of Three-dimensional Atmospheric Pressure Microwave Plasma Devices

中文摘要英文摘要

基于 BTA简化流体模型、DRUDE模型和 BP 神经网络,提出了一种"含等离子体与不含等离子体"(With and Without Plasma,WAWoP)数值计算模型,可用于三维大气压微波等离子体装置的设计与优化.该模型以不含等离子体(Without Plasma,WoP)状态下的最大电场强度 Emax 和含等离子体(With Plasma,WP)状态下的功率反射系数作为主要优化目标,只需完成两种状态下的电磁场计算,显著提高了计算效率.利用 BTA 简化流体模型计算不同微波输入功率和平均电场强度下的功率反射系数,同时,利用 BTA 模型计算电子温度和电子密度,再代入 DRUDE 模型计算等离子体的复介电常数,进而用于 WAWoP 模型中.结果表明,在不同条件下,WAWoP 模型与 BTA 简化流体模型计算得到的功率反射系数差异较小,初步验证了 WAWoP模型的可行性与工程实用性.

A WAWoP(With and Without Plasma)numerical calculation model is proposed based on the BTA simplified fluid model,the DRUDE model and a BP artificial neural network,which can efficiently accomplish the design and optimization of three-dimensional atmospheric pressure microwave plasma devices.The model takes the maximum electric field strength under the WoP(Without Plasma)condition and the power reflection coefficient un-der the WP(With Plasma)condition as the main optimization objectives.It only requires electromagnetic field cal-culations under these two conditions,thereby significantly improving the calculation efficiency.The BTA simplified fluid model is used to calculate the power reflection coefficient under different microwave incident powers and av-erage electric field strengths.Meanwhile,the calculated results of electron temperature and electron density are con-verted via the DRUDE model and then applied in the WAWoP model calculations.The results show that the power reflection coefficients obtained from the two models exhibit small differences under various conditions,preliminari-ly verifying the feasibility of the WAWoP model.

钟南亚

中国电子科技集团有限公司第十研究所,四川 成都 610036

数理科学

微波等离子体WAWoP数值计算模型BTA简化流体模型BP人工神经网络DRUDE模型

Microwave plasmaWAWoP numerical calculation modelBTA simplified fluid modelBP artifi-cial neural networkDrude model

《真空电子技术》 2026 (2)

67-75,9

10.16540/j.cnki.cn11-2485/tn.2026.02.12

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