凝胶注模成型ITO靶材坯体的开裂抑制研究OA
Investigation of cracking suppression in ITO target green bodies prepared by gel-casting
氧化铟锡(ITO)靶材是制备透明导电薄膜的关键材料,其成型质量直接影响最终性能.传统成型方法在制备高密度、大尺寸坯体时易出现裂纹、密度不均等问题.凝胶注模成型技术因具有高固含量浆料原位固化、坯体强度高、结构均匀等优势,适用于高性能ITO靶材的制备.然而,甲基丙烯酰胺(MAM)体系在干燥过程中易发生开裂.为此,本研究系统探讨了单体/交联剂配比、浆料固含量与凝胶化温度对坯体成型质量的影响.结果表明,当单体质量分数1％、单体/交联剂比例为20、固体质量分数为80％、凝胶化温度为55～65℃时,可获得结构均匀、无裂纹的ITO靶材坯体.本研究为高性能ITO靶材的凝胶注模成型提供了可靠的工艺优化方案.
Indium tin oxide(ITO)targets are crucial for depositing transparent conductive films,yet their fabrication often faces challenges such as cracking and density inhomogeneity,especially in large-sized green bodies.Gel-casting technology,with its advantages of in-situ solidification of high-solid-content slurries,high green body strength,and uniform structure,is suitable for the preparation of high-performance ITO targets.However,cracking during drying remains a critical issue in the methacrylamide(MAM)system.The effects of monomer/crosslinker ratio,slurry solid loading,and gelation temperature on the cracking behavior of ITO green bodies are systematically investigated.The results indicate that crack-free ITO green bodies with uniform microstructure can be achieved under the optimized conditions:monomer content of 1％,monomer/crosslinker ratio of 20,solid loading of 80％,and gelation temperature between 55 ℃ and 65℃.This work provides a reliable gel-casting strategy for fabricating high-quality ITO targets.
张力文
西安航空职业技术学院,陕西西安 710089
化学化工
胶态成型ITO靶材坯体单体交联剂
gel-castingITO green bodymonomercross-linker
《山东科学》 2026 (2)
108-112,5
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