Scalable and reproducible sub-5 nm manufacturing for next-generation devicesOA
Scalable and reproducible sub-5 nm manufacturing for next-generation devices
Lijuan Chen;Xiangming Li;Fenggang Ren;Yi Lv;Stefan A Maier;Jinyou Shao;Sihai Luo;Dongxu Yang;Qi Yuan;Yingfang Zhang;Bai Sun;Jian Lv;Xiaoliang Chen;Hongmiao Tian
Department of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaFrontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaSchool of Physics and Astronomy,Monash University,Clayton,Victoria,AustraliaFrontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaChinese Academy of Science,Institute of Optics and Electronics,PO Box 350,Chengdu,Sichuan 610209,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaDepartment of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaFrontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of ChinaFrontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China
sub-5 nmlithographydevicesnanofabricationnanostructures
sub-5 nmlithographydevicesnanofabricationnanostructures
《极端制造（英文）》 2026 (2)
352-390,39
This work was supported by the National Natural Science Foundation of China(Nos.52025055,52405627,52375576,52375575),the Key Research and Development Program of Shaanxi(Program.No.2022GXLH-01-12),the Sichuan Science and Technology Program(2023NSFSC0461),the Fundamental Research Funds for Xi'an Jiaotong University(No.xtr072024039).
评论