Synthesis of functional chalcogenide materials for memory/sensing devices and their integration into artificial sensory systemsOA
Synthesis of functional chalcogenide materials for memory/sensing devices and their integration into artificial sensory systems
Pengfei Liu;Taeyong Eom;Sungjin Park;In Soo Kim;Jae Won Heo;Hyeonmin Bong;Jinsik Choe;Huiyoung Lee;Won-Kyu Lee;Myung-Gil Kim;Donghee Son;Joohoon Kang
Nanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of KoreaDepartment of Semiconductor System Engineering,Sejong University,Seoul 05006,Republic of KoreaIcheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of KoreaNanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||School of Advanced Materials Science and Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Center for Nanoscale Materials,Argonne National Laboratory,Lemont,IL 60439,United States of AmericaNanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||School of Advanced Materials Science and Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of KoreaIcheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of Korea||Department of Physics,Yonsei University,Seoul 03722,Republic of KoreaIcheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of KoreaIcheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of Korea||Department of Physics,Yonsei University,Seoul 03722,Republic of KoreaDepartment of Materials Science and Engineering,Hongik University,Seoul 04066,Republic of KoreaNanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||School of Advanced Materials Science and Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of KoreaNanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Department of Electrical and Computer Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Center for Neuroscience Imaging Research,Institute for Basic Science(IBS),Sungkyunkwan University(SKKU),Suwon 16419,Republic of KoreaDepartment of Chemical and Biomolecular Engineering,Yonsei University,Seoul 03722,Republic of Korea
functional chalcogenidesmaterials synthesisdevice integrationartificial sensory systemphase-change memorysensing modalities
functional chalcogenidesmaterials synthesisdevice integrationartificial sensory systemphase-change memorysensing modalities
《极端制造（英文）》 2026 (2)
97-138,42
This work was supported by the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(RS-2024-00358623),the Technology Innovation Program(or Industrial Strategic Technology Development Program-Development of Next Generation Intelligent Semiconductors)(20025643,Development of intelligent physical vapor deposition equipment for hard mask applic-ations with high selectivity)funded By the Ministry of Trade,Industry & Energy(MOTIE,Korea),and KIST intramural Grants(2V10250 and 2E33221).T.E.acknowledges support from the faculty research fund of Sejong University in 2024.W.-K.L.was supported by 2024 Hongik University Research Fund.Parts of elements in Figures 1 and 14 were generated using Open AI's generative AI tool(DALL·E)based on author-provided descriptions.
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