FeCoNiMnHf高熵纳米软磁薄膜的电沉积制备与磁性能OA
Electrodeposition preparation and magnetic properties of FeCoNiMnHf high entropy nano-soft magnetic film
薄膜材料的面内单轴磁各向异性与高截止频率息息相关,更高集成度电子元件对高面内各项异性薄膜材料的需要越来越高.采用恒电压电沉积技术,在室温下制备了不同Hf浓度的FeCoNiMnHf高熵软磁薄膜,研究了 Hf浓度对高熵软磁薄膜微观形貌、软磁性能和磁各向异性的影响.结果表明:随着Hf浓度的上升,薄膜颗粒尺寸从240.94 nm增加到383.36 nm,结晶度由11.68%增加到24.72%.薄膜的面内单轴磁各向异性场从47.846×104A/m增加到66.2074×104A/m,并且饱和磁化强度从2.763×104A/m增加到10.630×104 A/m.FeCoNiMnHf薄膜在室温下表现出优异的磁学性能,使得其在高截止频率与磁各向异性相关的应用中具有重要的潜力.
The in-plane uniaxial magnetic anisotropy of thin-film materials is intricately linked to high cutoff frequencies.With the growing demand for high-integration electronic components,there is an increasing need for thin-film materials with high in-plane magnetic anisotropy.In this study,FeCoNiMnHf high-entropy soft magnetic thin films with varying Hf concentrations have been fabricated at room temperature using constant-voltage electrodeposition technology.The influence of Hf concentration on the microstructure,soft magnetic properties,and magnetic anisotropy of these high-entropy soft magnetic thin films is thoroughly investigated.The results reveal that as the Hf concentration increases,the grain size of the thin films expands from 240.94 nm to 383.36 nm,and the crystallinity improves from 11.68%to 24.72%.Moreover,the in-plane uniaxial magnetic anisotropy field of the thin films rises from 47.846×104 A/m to 66.2074×104 A/m,and the saturation magnetization increases from 2.763×104 A/m to 10.630×104 A/m.The FeCoNiMnHf thin films exhibit outstanding magnetic properties at room temperature,indicating significant potential for applications in areas related to high cutoff frequencies and magnetic anisotropy.
雷远腾;朱颖丽;李享成;陈平安;朱伯铨
武汉科技大学材料学部省部共建耐火材料与冶金国家重点实验室,武汉 430081武汉科技大学材料学部省部共建耐火材料与冶金国家重点实验室,武汉 430081武汉科技大学材料学部省部共建耐火材料与冶金国家重点实验室,武汉 430081武汉科技大学材料学部省部共建耐火材料与冶金国家重点实验室,武汉 430081武汉科技大学材料学部省部共建耐火材料与冶金国家重点实验室,武汉 430081
通用工业技术
高熵软磁薄膜FeCoNiMnHf面内单轴磁各向异性电沉积
high entropy soft magnetic filmFeCoNiMnHfin-plane uniaxial magnetic anisotropyelectrodeposition
《材料工程》 2026 (4)
330-337,8
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