基于石墨烯/聚合物自组装悬浮膜气压传感器的制备与性能探究OA

This paper presents the design and fabrication of a pressure sensor based on reduced graphene oxide suspended film(rGO-SF).The rGO-SF was formed through in-situ growth on pre-etched SiO2 cavities,where self-assembled graphene oxide(GO)films spontaneously separated from solution.Compared with conventional graphene-based pressure sensor fabrication processes,the rGO-SF sensor eliminates membrane transfer steps,significantly simplifying the manufacturing workflow and providing advantages for large-scale production.By introducing modified polymethyl methacrylate(M-PMMA)into the rGO interlayers,the oxygen transmission rate(OTR)of the M-PMMA/rGO composite film was reduced by 49.6%(at 20.0wt%M-PMMA loading),markedly enhancing the stability and reliability of the rGO-SF pressure sensor.Experimental results demonstrate that pressure differences between internal and external environments induce measurable resistance changes in rGO-SF.Leveraging this principle,pre-cise pressure measurement can be achieved by monitoring resistance variations.Testing shows the sensor effectively detects pressure changes in the 0 kPa to 100 kPa range,with excellent linearity(S2 ＝0.99)and sensitivity(1.298×10-3 kPa-1)particularly in the 30 kPa to 100 kPa differential pressure regime.